# US 9,437,573 B2 · Semiconductor device and method for manufacturing thereof

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- Number: US 9,437,573 B2
- Document ID: US9437573B2
- Status: Granted
- Kind: B2
- Application number: 14/136,977
- Filed: 2013-12-20
- Published: 2014-04-24
- Granted: 2016-09-06
- Earliest claimed: 2007-10-22
- Assignees: Cypress Semiconductor Corporation
- Applicants: Cypress Semiconductor Corporation
- Inventors: Naomi Masuda; Masataka Hoshino; Ryota Fukuyama
- Web page: https://patentgrep.com/patent/US9437573B2

## CPC

- H10W 72/019: {of bond pads}
- H10W 72/016: {of strap connectors}
- H10W 72/07141: {Means for applying energy, e.g. ovens or lasers}
- H10W 72/072: {of bump connectors}
- H10W 72/07231: {Techniques}
- H10W 72/07236: {Soldering or alloying}
- H10W 72/07254: {changes in dispositions}
- H10W 72/07331: {Connecting techniques}
- H10W 72/222: {Multilayered bumps, e.g. a coating on top and side surfaces of a bump core}
- H10W 72/241: {Dispositions, e.g. layouts}
- H10W 72/244: {relative to underlying supporting features, e.g. bond pads, RDLs or vias}
- H10W 72/252: {comprising solid metals or solid metalloids, e.g. PbSn, Ag or Cu}
- H10W 72/29: Bond pads specially adapted therefor
- H10W 72/934: {Cross-sectional shape, i.e. in side view}
- H10W 90/00: Package configurations
- H10W 90/722: {between stacked chips}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A semiconductor device which includes a first semiconductor chip 10, a first electrode 12 formed on the first semiconductor chip 10, a second semiconductor chip 20 to which the first semiconductor chip 10 is mounted, a second electrode 22 with a protrusion 24, which is formed on the second semiconductor chip 20, and a solder bump 14 which bonds the first electrode 12 and the second electrode 22 to cover at least a part of a side surface of the protrusion 24, and a method for manufacturing thereof are provided.

## Claims

### Claim 1

A method of manufacturing a semiconductor device comprising:
temporarily bonding a first electrode formed on a mount portion to a second electrode, the second electrode comprising a protrusion formed on a mounted portion, wherein temporarily bonding comprises selectively heating a leading end of the protrusion;
exposing the first electrode, the second electrode and a solder comprised in a bonding terminal disposed on the first electrode to a reducing gas; and
bonding, subsequent to the temporarily bonding, the first electrode to the second electrode by reflowing the solder on at least part of a side surface of the protrusion with the solder comprised in the bonding terminal, wherein
the protrusion is formed on the mounted portion by bringing the leading end of the protrusion into contact with the bonding terminal, and
at least one of the mount portion and the mounted portion comprises a semiconductor chip.

### Claim 2 (depends on 1)

The method of manufacturing a semiconductor device according to claim 1, wherein the temporarily bonding the first electrode to the second electrode comprises exposing a side surface of the second electrode and a surface of the solder not in contact with the leading end of the protrusion.

### Claim 3 (depends on 1)

The method of manufacturing a semiconductor device according to claim 1, wherein the temporarily bonding the first electrode to the second electrode comprises heating the first electrode and the second electrode such that:
a temperature of the leading end of the protrusion becomes equal to or higher than a melting point of the solder; and
a temperature of a portion of the second electrode other than the leading end of the protrusion becomes lower than the melting point of the solder.

### Claim 4 (depends on 1)

The method of manufacturing a semiconductor device according to claim 1, wherein the temporarily bonding the first electrode to the second electrode comprises moving at least one of the mount portion and the mounted portion to a position in which the temporarily bonded first electrode and second electrode are positioned to face each other.