# US 9,437,416 B2 · Supercritical drying method for semiconductor substrate

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- Number: US 9,437,416 B2
- Document ID: US9437416B2
- Status: Granted
- Kind: B2
- Application number: 13/231,956
- Filed: 2011-09-13
- Published: 2012-09-27
- Granted: 2016-09-06
- Earliest claimed: 2011-03-25
- Assignees: Kabushiki Kaisha Toshiba
- Applicants: Hidekazu Hayashi; Hiroshi Tomita; Yukiko Kitajima; Hisashi Okuchi; Yohei Sato
- Inventors: Hidekazu Hayashi; Hiroshi Tomita; Yukiko Kitajima; Hisashi Okuchi; Yohei Sato
- Web page: https://patentgrep.com/patent/US9437416B2

## CPC

- H10P 70/80: {Cleaning only by supercritical fluids}
- H10P 70/27: {during, before or after processing of conductive materials, e.g. polysilicon or amorphous silicon layers}
- H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)}
- H10P 72/0408: {for drying}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

According to one embodiment, a supercritical drying method for a semiconductor substrate includes introducing a semiconductor substrate formed with a metal film into a chamber, the surface of the substrate being wet with alcohol, supplying a supercritical fluid of carbon dioxide into the chamber, setting a temperature inside the chamber to a predetermined temperature, to replace the alcohol on the semiconductor substrate with the supercritical fluid, and discharging the supercritical fluid and the alcohol from the chamber while keeping the temperature inside the chamber at the predetermined temperature, to lower a pressure inside the chamber. The predetermined temperature is not lower than 75° C. but lower than a critical temperature of the alcohol.

## Claims

### Claim 1

A supercritical drying method for a semiconductor substrate, comprising:
introducing a semiconductor substrate into a chamber;
supplying a supercritical fluid into the chamber containing the semiconductor substrate and an alcohol;
setting a temperature inside the chamber to a predetermined temperature not lower than 75° C. but lower than a critical temperature of the alcohol; and
after supplying the supercritical fluid into the chamber, lowering a pressure inside the chamber while keeping the temperature inside the chamber at a temperature not lower than 75° C. but lower than a critical temperature of the alcohol in a condition where cohered alcohol inside the chamber is vaporized and the supercritical fluid is changed from a supercritical state to a gaseous state inside the chamber.

### Claim 2 (depends on 1)

The supercritical drying method for a semiconductor substrate according to claim 1, wherein the predetermined temperature is not lower than 97° C.

### Claim 3 (depends on 1)

The supercritical drying method for a semiconductor substrate according to claim 1, wherein
the semiconductor substrate is cleaned by use of a chemical liquid,
the semiconductor substrate is rinsed by use of pure water after the cleaning of the semiconductor substrate, and
the semiconductor substrate is rinsed by use of the alcohol after the rinsing of the semiconductor substrate by use of the pure water and before the introduction of the semiconductor substrate into the chamber.

### Claim 4 (depends on 3)

The supercritical drying method for a semiconductor substrate according to claim 3, wherein the substrate includes a metal film, and the metal film contains tungsten, titanium or titanium nitride.

### Claim 5 (depends on 1)

The supercritical drying method for a semiconductor substrate according to claim 1, wherein the alcohol is isopropyl alcohol, and the critical temperature is 235.6° C.

### Claim 6 (depends on 1)

The supercritical drying method for a semiconductor substrate according to claim 1, wherein the semiconductor substrate is immersed into the supercritical fluid for a predetermined period of time before lowering of the pressure inside the chamber.

### Claim 7 (depends on 6)

The supercritical drying method for a semiconductor substrate according to claim 6, wherein the pressure inside the chamber is set to an atmospheric pressure after the predetermined period of time has elapsed.

### Claim 8 (depends on 1)

The supercritical drying method for a semiconductor substrate according to claim 1, wherein the semiconductor substrate is formed with a metal film.

### Claim 9 (depends on 1)

The supercritical drying method for a semiconductor substrate according to claim 1, wherein the substrate is introduced into the chamber, the surface of the substrate being wet with alcohol.

### Claim 10 (depends on 1)

The supercritical drying method for a semiconductor substrate according to claim 1, wherein the supercritical fluid contains carbon dioxide.

### Claim 11 (depends on 1)

The supercritical drying method for a semiconductor substrate according to claim 1, wherein the alcohol on the semiconductor substrate is replaced with the supercritical fluid of carbon dioxide.