# US 9,437,401 B2 · System and method for plasma treatment using directional dielectric barrier discharge energy system

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- Number: US 9,437,401 B2
- Document ID: US9437401B2
- Status: Granted
- Kind: B2
- Application number: 14/575,791
- Filed: 2014-12-18
- Published: 2016-06-23
- Granted: 2016-09-06
- Earliest claimed: 2013-12-20
- Assignees: Plasmology4, Inc.
- Applicants: Plasmology4, Inc.
- Inventors: Greg A. Watson; Jeffrey I. Meyers
- Web page: https://patentgrep.com/patent/US9437401B2

## CPC

- H01J 37/32348: {Dielectric barrier discharge}
- A61B 18/042: {using additional gas becoming plasma}
- A61N 1/44: Applying ionised fluids {(ion generators H01J37/00)}
- H01J 37/32366: {Localised processing}
- H01J 37/3255: {Material}
- H01J 37/3266: {Magnetic control means}
- H01J 37/32669: {Particular magnets or magnet arrangements for controlling the discharge}
- A61L 2/14: Plasma, i.e. ionised gases
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D)
- A61N: ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY (measurement of bioelectric currents A61B; surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body A61B18/00; anaesthetic apparatus in general A61M; incandescent lamps H01K; infrared radiators for heating H05B)
- A61L: METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES (preservation of bodies or disinfecting characterised by the agents employed A01N; preserving, e.g. sterilising, food or foodstuffs A23; preparations for medical, dental or toiletry purposes A61K)

## Abstract

A system including a directional dielectric barrier discharge (DBD) energy system, including a first electrode assembly configured to generate energy, including a first housing having a first fluid disposed in a first chamber, a first magnet, wherein the first magnet is configured to help guide or contain the energy generated by the first electrode assembly, and a first dielectric barrier.

## Claims

### Claim 1

A system comprising:
a directional dielectric barrier discharge (DBD) energy system, comprising:
a first electrode assembly configured to generate energy, comprising:
a first housing having a first fluid disposed in a first chamber;
a first magnet, wherein the first magnet is configured to help guide or contain the energy generated by the first electrode assembly; and
a first dielectric barrier.

### Claim 2 (depends on 1)

The system of claim 1, wherein the directional DBD energy system is configured to generate a cold plasma.

### Claim 3 (depends on 2)

The system of claim 2, wherein the first magnet comprises a permanent magnet and is configured to help guide or contain the cold plasma.

### Claim 4 (depends on 2)

The system of claim 2, comprising a second magnet configured to help guide or contain the cold plasma and energy, wherein the second magnet comprises an electromagnet with windings in a first direction.

### Claim 5 (depends on 4)

The system of claim 4, comprising a third magnet configured to guide the cold plasma and energy, wherein the third magnet comprises a permanent magnet.

### Claim 6 (depends on 5)

The system of claim 5, wherein the first dielectric barrier couples to the first magnet, the first magnet couples to the second magnet, and the second magnet couples to the third magnet.

### Claim 7 (depends on 1)

The system of claim 1, comprising a first conductive material in the conductive fluid.

### Claim 8 (depends on 1)

The system of claim 1, wherein the first conductive material comprises non-ferromagnetic particles.

### Claim 9 (depends on 1)

The system of claim 1, wherein the directional DBD energy system comprises a second electrode assembly, comprising:
a second housing having a second fluid;
a conductive line coupled to the second housing or ground;
a fourth magnet coupled to the second housing, wherein the fourth magnet is configured to help guide or contain a cold plasma and the energy; and
a second dielectric barrier,
wherein the first electrode assembly is configured to be positioned on a first side of a substrate and the second electrode assembly is configured to be positioned axially opposite the first electrode assembly on a second side of the substrate.

### Claim 10 (depends on 9)

The system of claim 9, wherein a polarity of the fourth magnet is oriented in the same direction as the first magnet, and wherein the first magnet and the fourth magnet are configured to help guide and contain the cold plasma.

### Claim 11 (depends on 9)

The system of claim 9, wherein the second electrode assembly comprises a fifth and sixth magnet configured to help guide and contain the cold plasma.

### Claim 12

A system comprising:
a directional dielectric barrier discharge (DBD) energy system configured to generate energy, comprising:
a first electrode assembly configured to be positioned on a first side of a substrate; and
a second electrode assembly, wherein the second electrode is configured to be positioned on a second side of a substrate.

### Claim 13 (depends on 12)

The system of claim 12, wherein directional DBD energy system is configured to generate a cold plasma, and wherein the first electrode assembly comprises a first magnet configured to help guide and contain the cold plasma and the energy.

### Claim 14 (depends on 13)

The system of claim 13, wherein the second electrode assembly comprises a second magnet configured to help guide and contain the cold plasma and the energy.

### Claim 15 (depends on 12)

The system of claim 12, comprising a controller configured to control the first electrode assembly, the second electrode assembly, or both to generate the cold plasma to treat the substrate with a plasma treatment protocol.

### Claim 16 (depends on 15)

The system of claim 15, comprising a fixture configured to maintain the first electrode assembly and the second electrode assembly in a co-axial relationship during operation.

### Claim 17

A system comprising:
a directional dielectric barrier discharge (DBD) energy system configured to generate energy, comprising:
a first electrode assembly comprising:
a first housing having a first fluid in a first chamber; and
a second housing having a second fluid in a second chamber.

### Claim 18 (depends on 17)

The system of claim 17, comprising a second electrode assembly comprising a third housing having a third fluid disposed in a third chamber and a fourth housing having a fourth fluid disposed in a fourth chamber, wherein the first and second electrode assemblies are spaced apart from one another about a treatment area.

### Claim 19 (depends on 17)

The system of claim 17, wherein the directional DBD energy system is configured to generate a cold plasma, and wherein a first magnet surrounds the first housing and a second magnet surrounds the second housing, and wherein the first magnet and the second magnet are configured to help guide and contain the cold plasma and energy.

### Claim 20 (depends on 17)

The system of claim 17, wherein the first or second housing is configured to be placed within a target cavity.
