# US 9,436,036 B2 · Method for manufacturing semiconductor device

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- Number: US 9,436,036 B2
- Document ID: US9436036B2
- Status: Granted
- Kind: B2
- Application number: 14/749,962
- Filed: 2015-06-25
- Published: 2015-10-15
- Granted: 2016-09-06
- Earliest claimed: 2006-03-03
- Assignees: Semiconductor Energy Laboratory Co., Ltd.
- Applicants: Semiconductor Energy Laboratory Co., Ltd.
- Inventors: Yasuhiro Jinbo; Masafumi Morisue; Hajime Kimura; Shunpei Yamazaki
- Web page: https://patentgrep.com/patent/US9436036B2

## CPC

- H10D 86/0214: {using temporary substrates}
- G02F 1/133305: {Flexible substrates, e.g. plastics, organic film}
- G02F 1/133603: {with LEDs}
- H10D 86/40: characterised by multiple TFTs
- H10D 86/60: wherein the TFTs are in active matrices
- H10H 20/857: Interconnections, e.g. lead-frames, bond wires or solder balls
- H10H 29/14: comprising multiple light-emitting semiconductor components
- H10P 72/74: {using temporarily an auxiliary support}
- H10H 20/018: {Bonding of wafers}
- H10K 71/80: using temporary substrates
- H10P 72/7412: {the auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support}
- H10P 72/7442: {Separation by peeling}
- Y02E 10/549: Organic PV cells
- Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

The present invention provides a manufacturing technique of a semiconductor device and a display device using a peeling process, in which a transfer process can be conducted with a good state in which a shape and property of an element before peeling are kept. Further, the present invention provides a manufacturing technique of more highly reliable semiconductor devices and display devices with high yield without complicating the apparatus and the process for manufacturing. According to the present invention, an organic compound layer including a photocatalyst substance is formed over a first substrate having a light-transmitting property, an element layer is formed over the organic compound layer including a photocatalyst substance, the organic compound layer including a photocatalyst substance is irradiated with light which has passed through the first substrate, and the element layer is peeled from the first substrate.

## Claims

### Claim 1

A flexible electronic device comprising:
a display device portion comprising:
a first flexible substrate; and
a liquid crystal element on the first flexible substrate; and
a backlight comprising:
a second flexible substrate; and
a first light-emitting diode and a second light-emitting diode on a first portion and on a second portion of the second flexible substrate, respectively, wherein the backlight and the display device portion overlap; and
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a thickness of the first light-emitting diode and a thickness of the second light-emitting diode.

### Claim 2

A flexible electronic device comprising:
a display device portion comprising:
a first flexible substrate; and
a liquid crystal element on the first flexible substrate; and
a backlight comprising:
a second flexible substrate; and
a first light-emitting diode and a second light-emitting diode on a first portion and on a second portion of the second flexible substrate, respectively,
wherein the backlight and the display device portion overlap, and
wherein the backlight can be bent so that, when a side of the second flexible substrate is bent, a short side of the first light-emitting diode and a short side of the second light-emitting diode are parallel to the side of the second flexible substrate.

### Claim 3

A flexible electronic device comprising:
a display device portion comprising:
a first flexible substrate; and
a liquid crystal element on the first flexible substrate; and
a backlight comprising:
a second flexible substrate; and
a first light-emitting diode and a second light-emitting diode on a first portion and on a second portion of the second flexible substrate, respectively,
wherein the backlight and the display device portion overlap, and
wherein the backlight can be bent so that the first light-emitting diode and the second light-emitting diode are interposed between the first portion and the second portion of the second flexible substrate.

### Claim 4 (depends on 3)

The flexible electronic device according to claim 3,
wherein the backlight can be bent so that, when a side of the second flexible substrate is bent, a short side of the first light-emitting diode and a short side of the second light-emitting diode are parallel to the side of the second flexible substrate.

### Claim 5 (depends on 1)

The flexible electronic device according to claim 1,
wherein the backlight can be bent so that a top surface of the first light-emitting diode faces a top surface of the second light-emitting diode.

### Claim 6 (depends on 2)

The flexible electronic device according to claim 2,
wherein the backlight can be bent so that a top surface of the first light-emitting diode faces a top surface of the second light-emitting diode.

### Claim 7 (depends on 3)

The flexible electronic device according to claim 3,
wherein the backlight can be bent so that a top surface of the first light-emitting diode faces a top surface of the second light-emitting diode.

### Claim 8 (depends on 2)

The flexible electronic device according to claim 2,
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a thickness of the first light-emitting diode and a thickness of the second light-emitting diode.

### Claim 9 (depends on 3)

The flexible electronic device according to claim 3,
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a thickness of the first light-emitting diode and a thickness of the second light-emitting diode.

### Claim 10 (depends on 1)

The flexible electronic device according to claim 1, further comprising:
first and second resin layers covering top and side portions of the first light-emitting diode and of the second light-emitting diode, respectively;
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a maximum thickness of the first resin layer and a maximum thickness of the second resin layer.

### Claim 11 (depends on 2)

The flexible electronic device according to claim 2, further comprising:
first and second resin layers covering top and side portions of the first light-emitting diode and of the second light-emitting diode, respectively;
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a maximum thickness of the first resin layer and a maximum thickness of the second resin layer.

### Claim 12 (depends on 3)

The flexible electronic device according to claim 3, further comprising:
first and second resin layers covering top and side portions of the first light-emitting diode and of the second light-emitting diode, respectively;
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a maximum thickness of the first resin layer and a maximum thickness of the second resin layer.

### Claim 13 (depends on 1)

The flexible electronic device according to claim 1,
wherein the first light-emitting diode and the second light-emitting diode are adjacent diodes in a column of a matrix of diodes provided on the second flexible substrate.

### Claim 14 (depends on 2)

The flexible electronic device according to claim 2,
wherein the first light-emitting diode and the second light-emitting diode are adjacent diodes in a column of a matrix of diodes provided on the second flexible substrate.

### Claim 15 (depends on 3)

The flexible electronic device according to claim 3,
wherein the first light-emitting diode and the second light-emitting diode are adjacent diodes in a column of a matrix of diodes provided on the second flexible substrate.

### Claim 16

An electronic device comprising:
a display device portion comprising:
a first substrate; and
a liquid crystal element on the first substrate; and
a backlight comprising:
a second substrate, the second substrate being bent; and
a first light-emitting diode and a second light-emitting diode on a first portion and on a second portion of the second substrate, respectively, wherein the backlight and the display device portion overlap; and
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a thickness of the first light-emitting diode and a thickness of the second light-emitting diode.

### Claim 17

An electronic device comprising:
a display device portion comprising:
a first substrate; and
a liquid crystal element on the first substrate; and
a backlight comprising:
a second substrate, the second substrate being bent; and
a first light-emitting diode and a second light-emitting diode on a first portion and on a second portion of the second substrate, respectively,
wherein the backlight and the display device portion overlap, and
wherein the backlight is bent so that, when a side of the second substrate is bent, a short side of the first light-emitting diode and a short side of the second light-emitting diode are parallel to the side of the second substrate.

### Claim 18

An electronic device comprising:
a display device portion comprising:
a first substrate; and
a liquid crystal element on the first substrate; and
a backlight comprising:
a second substrate, the second substrate being flexible and bent; and
a first light-emitting diode and a second light-emitting diode on a first portion and on a second portion of the second substrate, respectively,
wherein the backlight and the display device portion overlap, and
wherein the backlight can be bent so that the first light-emitting diode and the second light-emitting diode are interposed between the first portion and the second portion of the second flexible substrate.

### Claim 19 (depends on 18)

The electronic device according to claim 18,
wherein the backlight can be bent so that, when a side of the second flexible substrate is bent, a short side of the first light-emitting diode and a short side of the second light-emitting diode are parallel to the side of the second flexible substrate.

### Claim 20 (depends on 16)

The electronic device according to claim 16,
wherein the backlight can be bent so that a top surface of the first light-emitting diode faces a top surface of the second light-emitting diode.

### Claim 21 (depends on 17)

The electronic device according to claim 17,
wherein the backlight can be bent so that a top surface of the first light-emitting diode faces a top surface of the second light-emitting diode.

### Claim 22 (depends on 18)

The electronic device according to claim 18,
wherein the backlight can be bent so that a top surface of the first light-emitting diode faces a top surface of the second light-emitting diode.

### Claim 23 (depends on 17)

The electronic device according to claim 17,
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a thickness of the first light-emitting diode and a thickness of the second light-emitting diode.

### Claim 24 (depends on 18)

The electronic device according to claim 18,
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a thickness of the first light-emitting diode and a thickness of the second light-emitting diode.

### Claim 25 (depends on 16)

The electronic device according to claim 16, further comprising:
first and second resin layers covering top and side portions of the first light-emitting diode and of the second light-emitting diode, respectively;
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a maximum thickness of the first resin layer and a maximum thickness of the second resin layer.

### Claim 26 (depends on 17)

The electronic device according to claim 17, further comprising:
first and second resin layers covering top and side portions of the first light-emitting diode and of the second light-emitting diode, respectively;
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a maximum thickness of the first resin layer and a maximum thickness of the second resin layer.

### Claim 27 (depends on 18)

The electronic device according to claim 18, further comprising:
first and second resin layers covering top and side portions of the first light-emitting diode and of the second light-emitting diode, respectively;
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a maximum thickness of the first resin layer and a maximum thickness of the second resin layer.

### Claim 28 (depends on 16)

The electronic device according to claim 16,
wherein the first light-emitting diode and the second light-emitting diode are adjacent diodes in a column of a matrix of diodes provided on the second flexible substrate.

### Claim 29 (depends on 17)

The electronic device according to claim 17,
wherein the first light-emitting diode and the second light-emitting diode are adjacent diodes in a column of a matrix of diodes provided on the second flexible substrate.

### Claim 30 (depends on 18)

The electronic device according to claim 18,
wherein the first light-emitting diode and the second light-emitting diode are adjacent diodes in a column of a matrix of diodes provided on the second flexible substrate.

### Claim 31

A flexible electronic device comprising:
a flexible substrate; and
a first light-emitting diode and a second light-emitting diode on a first portion and on a second portion of the flexible substrate, respectively,
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a thickness of the first light-emitting diode and a thickness of the second light-emitting diode.

### Claim 32 (depends on 31)

The flexible electronic device according to claim 31, further comprising:
first and second resin layers covering top and side portions of the first light-emitting diode and of the second light-emitting diode, respectively;
wherein an interval between the first light-emitting diode and the second light-emitting diode is larger than a sum of a maximum thickness of the first resin layer and a maximum thickness of the second resin layer.

### Claim 33 (depends on 31)

The flexible electronic device according to claim 31,
wherein the first light-emitting diode and the second light-emitting diode are adjacent diodes in a column of a matrix of diodes provided on the flexible substrate.