Interlayer light wave coupling device
AssigneeNational Institute of Advanced Industrial Science and Technology
InventorsYouichi Sakakibara, Ryohei Takei, Masahiko Mori, Toshihiro Kamei
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Abstract
An interlayer light wave coupling device includes a substrate; a first core disposed on the substrate and having a first acute structure; a third core spatially set apart from the first core and having a second acute structure; and a second core disposed between the first core and the third core and having a smaller index of refraction than the first core and the third core. The acute structures of the first core and the third core are disposed so as to have no overlap as viewed from above.
Claims19
An interlayer light wave coupling device comprising:
- a substrate;
- a first core disposed on the substrate, the first core having a first acute structure and comprising hydrogenated amorphous silicon;
- a third core spatially set apart from the first core, the third core having a second acute structure and comprising hydrogenated amorphous silicon;
- and a second core disposed between the first core and the third core and having a smaller index of refraction than the first core and the third core, the first acute structure and the second acute structure being disposed so as to have no overlap as viewed from above, and wherein the acute structure has a sloped sidewall at least on one side.
Dependencies are inferred from the claim text.