# US 9,435,823 B2 · Physical quantity sensor, electronic device, and moving object

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- Number: US 9,435,823 B2
- Document ID: US9435823B2
- Status: Granted
- Kind: B2
- Application number: 14/152,179
- Filed: 2014-01-10
- Published: 2014-07-17
- Granted: 2016-09-06
- Earliest claimed: 2013-01-11
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Atsuki Naruse
- Web page: https://patentgrep.com/patent/US9435823B2

## CPC

- G01P 15/125: by capacitive pick-up
- G01P 15/0802: {Details}
- G01P 2015/0814: {for translational movement of the mass, e.g. shuttle type}
- G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G})

## Abstract

A physical quantity sensor includes: an element piece including a movable weight and movable electrode portions which are provided to extend from the movable weight; fixed electrode portions which are provided in a first direction in which the element piece is displaced, with a gap d1 interposed therebetween; and fixed portions which are provided to face an end portion of the element piece, in which a recess is provided on the end portion of the movable weight in a position facing the fixed portions, a first stopper portion which extends towards the movable weight is provided on the fixed portion, and a tip end of the first stopper portion is inserted into the recess, and a gap d2 between the tip end and the movable weight is narrower than the gap d1.

## Claims

### Claim 1

A physical quantity sensor comprising:
an element piece including a movable weight and movable electrode portions which are provided to extend from the movable weight;
fixed electrode portions which are provided in a first direction in which the element piece is displaced, with a gap d1 interposed therebetween; and
fixed portions which are provided to face an end portion of the element piece,
wherein a recess is provided on an end portion of the movable weight in a position facing the fixed portions,
the recess extends from an end of the movable weight into the movable weight along an axis through the center of the movable weight,
a first stopper portion which extends towards the movable weight is provided on the fixed portion, and
a tip end of the first stopper portion is inserted into the recess, and a gap d2 between the tip end and the movable weight is narrower than the gap d1.

### Claim 2 (depends on 1)

The physical quantity sensor according to claim 1,
wherein the first stopper portion extends towards the first direction.

### Claim 3 (depends on 2)

The physical quantity sensor according to claim 2,
wherein the movable electrode portions extend in a second direction which intersects with the first direction, and the gap d1 is a gap between the movable electrode portions and the fixed electrode portions.

### Claim 4 (depends on 2)

The physical quantity sensor according to claim 2,
wherein a first protrusion which is provided to extend in a second direction which intersects with the first direction is included in the recess.

### Claim 5 (depends on 3)

The physical quantity sensor according to claim 3,
wherein a first protrusion which is provided to extend in the second direction which intersects with the first direction is included in the recess.

### Claim 6 (depends on 4)

The physical quantity sensor according to claim 4,
wherein a second stopper portion which is provided to extend in the second direction is provided on the first stopper portion.

### Claim 7 (depends on 5)

The physical quantity sensor according to claim 5,
wherein a second stopper portion which is provided to extend in the second direction is provided on the first stopper portion.

### Claim 8 (depends on 6)

The physical quantity sensor according to claim 6,
wherein a second protrusion which is provided to extend in the first direction is provided on the second stopper portion.

### Claim 9 (depends on 7)

The physical quantity sensor according to claim 7,
wherein a second protrusion which is provided to extend in the first direction is provided on the second stopper portion.

### Claim 10 (depends on 8)

The physical quantity sensor according to claim 8,
wherein a third protrusion is provided on the movable weight in a position facing the second stopper portion.

### Claim 11 (depends on 9)

The physical quantity sensor according to claim 9,
wherein a third protrusion is provided on the movable weight in a position facing the second stopper portion.

### Claim 12 (depends on 1)

An electronic device on which the physical quantity sensor according to claim 1 is loaded.

### Claim 13 (depends on 1)

A moving object on which the physical quantity sensor according to claim 1 is loaded.
