# US 9,435,742 B2 · Automated plasma cleaning system

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- Number: US 9,435,742 B2
- Document ID: US9435742B2
- Status: Granted
- Kind: B2
- Application number: 13/746,102
- Filed: 2013-01-21
- Published: 2014-07-24
- Granted: 2016-09-06
- Earliest claimed: 2013-01-21
- Assignees: SciAps, Inc.
- Applicants: SciAps, Inc.
- Inventors: David Day
- Web page: https://patentgrep.com/patent/US9435742B2

## CPC

- G01N 21/718: {Laser microanalysis, i.e. with formation of sample plasma}
- G01J 3/443: Emission spectrometry
- H01J 37/32853: {Hygiene}
- H01J 37/32972: {Spectral analysis}
- G01J 3/0272: {Handheld}
- G01J 3/2823: {Imaging spectrometer}
- G01N 2201/0221: Portable; cableless; compact; hand-held
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

An analysis (e.g., LIBS) system includes a laser source generating a laser beam for creating a plasma at a location on a sample, and a spectrometer responsive to photons emitted by the sample at said location and having an output. A controller is responsive to a trigger signal and is configured to activate the laser source generating a series of laser pulses in a cleaning cycle, process the spectrometer output, and automatically terminate the cleaning cycle based on the spectrometer output.

## Claims

### Claim 1

An analysis system comprising:
a laser source generating a laser beam for creating a plasma at a location on a sample;
a spectrometer responsive to photons emitted by the sample at said location and having an output; and
a controller subsystem, responsive to a trigger signal, and including a memory with computer code stored therein including programming to:
activate the laser source generating a series of laser pulses striking the sample location in a cleaning cycle,
process the resulting spectrometer output,
automatically terminate the cleaning cycle at said sample location based on the spectrometer output indicating a clean sample location and
initiate an analysis cycle at said sample location.

### Claim 2 (depends on 1)

The system of claim 1 in which processing the spectrometer output includes analyzing the intensity of one or more peaks for multiple pulses.

### Claim 3 (depends on 2)

The system of claim 2 in which terminating the cleaning cycle occurs when said intensity changes by less than a predetermined percentage over a predetermined number of laser pulses.

### Claim 4 (depends on 3)

The system of claim 3 in which analyzing the intensity includes computing a rolling average of the intensity over multiple pulses.

### Claim 5 (depends on 1)

The system of claim 1 further including an adjustable focusing lens for focusing the laser beam to a small spot size at said sample location.

### Claim 6 (depends on 5)

The system of claim 5 in which the controller is further configured to adjust the focusing lens to produce a larger spot size during the cleaning cycle.

### Claim 7 (depends on 6)

The system of claim 6 in which the controller is further configured to adjust said focusing lens based on the spectrometer output.

### Claim 8 (depends on 7)

The system of claim 7 in which the controller is configured to adjust said focusing lens until a maximum or near maximum intensity is reached for at least one peak.

### Claim 9 (depends on 1)

The system of claim 1 further including a movable optic configured to sequentially create a plasma at multiple locations on the sample.

### Claim 10 (depends on 9)

The system of claim 9 in which the controller is further configured to adjust said optic and initiate and terminate the cleaning cycle at multiple locations on the sample.

### Claim 11

An analysis method comprising:
in response to a trigger signal, activating a laser source generating a series of laser pulses creating a plasma at a location on a sample in a cleaning cycle;
detecting photons emitted by the sample at said location and producing an output;
processing the output;
automatically terminating the cleaning cycle based on the output indicating a clean sample location; and
initiating an analysis cycle at said location.

### Claim 12 (depends on 11)

The method of claim 11 in which processing the output includes analyzing the intensity of one or more peaks for multiple pulses.

### Claim 13 (depends on 12)

The method of claim 12 in which terminating the cleaning cycle occurs when said intensity changes by less than a predetermined percentage over a predetermined number of laser pulses.

### Claim 14 (depends on 13)

The method of claim 13 in which analyzing the intensity includes computing a rolling average of the intensity over multiple pulses.

### Claim 15 (depends on 11)

The method of claim 11 further including adjusting the focus of the laser pulses to a small spot size on said sample.

### Claim 16 (depends on 15)

The method of claim 15 further including adjusting the focus to produce a larger spot size during the cleaning cycle.

### Claim 17 (depends on 15)

The method of claim 15 including adjusting said focus based on the output.

### Claim 18 (depends on 17)

The method of claim 17 including adjusting the focus until a maximum or near maximum intensity is reached for at least one peak.

### Claim 19 (depends on 11)

The method of claim 11 further including creating a plasma at multiple locations on the sample.

### Claim 20 (depends on 19)

The method of claim 19 further including initiating and terminating the cleaning cycle at multiple locations on the sample.

### Claim 21

An analysis system comprising:
a laser source generating a laser beam for creating a plasma at a location on a sample;
a spectrometer responsive to photons emitted by the sample at said location and having an output; and
means, responsive to a trigger signal, for:
activating the laser source generating a series of laser pulses striking the sample location in a cleaning cycle,
processing the resulting spectrometer output,
automatically terminating the cleaning cycle based on the spectrometer output indicating a clean sample location; and
initiating an analysis cycle at said sample location.
