# US 9,435,634 B2 · Detection device and method

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- Number: US 9,435,634 B2
- Document ID: US9435634B2
- Status: Granted
- Kind: B2
- Application number: 14/471,279
- Filed: 2014-08-28
- Published: 2015-11-12
- Granted: 2016-09-06
- Earliest claimed: 2014-05-07
- Assignees: Boe Technology Group Co., Ltd.; Beijing Boe Display Technology Co., Ltd.
- Applicants: BOE Technology Group Co., Ltd.; Beijing BOE Display Technology Co., Ltd.
- Inventors: Huali Yao; Chaoqin Xu; Liping Luo; Zengbiao Sun; Shaoshuai Mu; Huishuang Liu
- Web page: https://patentgrep.com/patent/US9435634B2

## CPC

- G01B 11/002: {for measuring two or more coordinates}
- G01N 21/8851: {Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges (G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002)}
- G01N 21/956: Inspecting patterns on the surface of objects {(contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20)}
- G01N 2201/061: Sources
- G01N 2201/12: Circuits of general importance; Signal processing
- G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

A detection device and a detection method are disclosed in the embodiments. The detection device comprises a light source, a first image information acquisition unit, a first charge coupled device (CCD), a first light splitter, and a first analyzer. The first image information acquisition unit is configured to receive a first light signal from the light source and transmit the first light signal onto a substrate, and to acquire a first image light signal generated by transmitting the first light signal onto both an edge of a first ID figure on the substrate and an edge of the substrate, and transmit the first image light signal to the first light splitter; the first light splitter is configured to transmit the first image light signal to the first CCD so that the first CCD outputs a first electrical signal; and the first analyzer is configured to receive the first electrical signal outputted from the first CCD and analyze wave crests of the first electrical signal, thereby obtaining a distance between the edge of the first ID figure on the substrate and the edge of the substrate. The detection part and detection method are used for substrate detection.

## Claims

### Claim 1

A detection device, comprising:
a light source, a first image information acquisition unit, a first charge coupled device (CCD), a first light splitter, and a first analyzer, wherein:
the first image information acquisition unit is configured to receive a first light signal from the light source and transmit the first light signal onto a substrate, and to acquire a first image light signal generated by transmitting the first light signal onto both an edge of a first ID figure on the substrate and an edge of the substrate, and transmit the first image light signal to the first light splitter;
the first light splitter is configured to transmit the first image light signal to the first CCD so that the first CCD outputs a first electrical signal;
the first analyzer is configured to receive the first electrical signal outputted from the first CCD and analyze wave crests of the first electrical signal, thereby obtaining a distance between the edge of the first ID figure on the substrate and the edge of the substrate; and
the detection device further comprising:
a first reflecting mirror, wherein:
the first light splitter is configured to receive the first light signal from the light source through the first reflecting mirror while the first reflecting mirror filters out interference light signals from the first light signal; and
the first light splitter is further configured to transmit the received first light signal to the first image information acquisition unit,
the detection device further comprising:
a second light splitter, a third light splitter, a second Image Information acquisition unit, a second CCD, and a second analyzer, wherein:
the second light splitter is configured to split the light signal emitted from the light source into the first light signal and a second light signal, and transmit the second light signal to the third light splitter;
the third light splitter is configured to transmit the second light signal to the second image information acquisition unit;
the second image information acquisition unit is configured to transmit the received second light signal onto the substrate, and to acquire a second image light signal generated by transmitting the second light signal onto both an edge of a second ID figure on the substrate and an edge of the substrate, and transmit the second image light signal to the third light splitter;
the third light splitter is further configured to transmit the second image light signal to the second CCD so that the second CCD outputs a second electrical signal; and
the second analyzer is configured to receive the second electrical signal outputted front the second CCD and analyze wave crests of the second electrical signal, thereby obtaining a distance between the edge of the second ID figure on the substrate and the edge of the substrate.

### Claim 2 (depends on 1)

The detection device of claim 1, further comprising: a second reflecting mirror configured to reflect the second light signal to the third light splitter while filtering out interference light signals from the second light signal.

### Claim 3 (depends on 1)

The detection device of claim 1, wherein the first image information acquisition unit comprises a lens.

### Claim 4

The detection device of claim wherein the second image information acquisition unit comprises a lens.

### Claim 5

A detection method, comprising:
receiving a first light signal from a light source by a first image information acquisition unit;
transmitting, by the first image information acquisition unit, the first light signal received from the light source onto a substrate, and acquiring, by the first image information acquisition unit, a first image light signal generated by transmitting the first light signal onto both an edge of a first ID figure on the substrate and an edge of the substrate, and transmitting, by the first image information acquisition unit, the first image light signal to a first light splitter;
transmitting, by the first light splitter, the first image light signal to a first CCD so that the first CCD outputs a first electrical signal;
analyzing the first electrical signal outputted from the first CCD, and calculating a difference between peak values of two wave crests presented in the first electrical signal, and if the difference is greater than a preset threshold value, then it is determined that a position of the first ID figure is abnormal;
the receiving the first light signal from the light source comprising:
filtering out interference light signals from the first light signal and transmitting the first light signal to a first light splitter, by a first reflecting mirror; and transmitting, by the first light splitter, the first light signal transmitted by the first reflecting mirror to the first image information acquisition unit; and
further comprising:
splitting, by a second light splitter, the light signal emitted from the light source into the first light signal and a second light signal;
transmitting, by a third light splitter, the second light signal to a second image information acquisition unit;
transmitting, by the second image information acquisition unit, the received second light signal onto the substrate, and acquiring, by the second image information acquisition unit, a second image light signal generated by transmitting the second light signal onto both an edge of a second ID figure on the substrate and an edge of the substrate, and transmitting, by the second image information acquisition unit, the second image light signal to the third light splitter;
transmitting, by the third light splitter, the second image light signal to the second CCD so that the second CCD outputs a second electrical signal; and
analyzing the second electrical signal outputted from the second CCD, and calculating a difference between peak values of two wave crests presented in the second electrical signal, and, determining that a position of the second ID figure is abnormal if the difference is greater than the preset threshold value.

### Claim 6 (depends on 5)

The detection method of claim 5, further comprising:
filtering out interference light signals from the second light signal and then reflecting the second light signal to the third light splitter, by the second reflecting mirror.

### Claim 7 (depends on 5)

The detection method of claim 5, further comprising:
outputting abnormal information to a terminal if it is determined that the position of the first ID figure is abnormal.

### Claim 8 (depends on 5)

The detection method of claim 5, further comprising:
outputting abnormal information to a terminal if it is determined that the positions of the first and second ID figures are abnormal.

### Claim 9 (depends on 5)

The detection method of claim 5, wherein:
the first image information acquisition unit comprises a lens.

### Claim 10 (depends on 5)

The detection method of claim 5, wherein:
the second image information acquisition unit comprises a lens.