# US 9,435,631 B2 · Discrete magnetic angle sensor device, a magnetic angle sensor arrangement, a method for generating an angle signal and a method for providing a sensor signal > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,435,631 B2 - Document ID: US9435631B2 - Status: Granted - Kind: B2 - Application number: 13/944,410 - Filed: 2013-07-17 - Published: 2015-01-22 - Granted: 2016-09-06 - Earliest claimed: 2013-07-17 - Assignees: Infineon Technologies AG - Applicants: Infineon Technologies AG - Inventors: Udo Ausserlechner - Web page: https://patentgrep.com/patent/US9435631B2 ## CPC - G01B 7/30: for measuring angles or tapers; for testing the alignment of axes - G01D 5/145: {influenced by the relative movement between the Hall device and magnetic fields (see G01R33/06)} - G01D 5/147: {influenced by the movement of a third element, the position of Hall device and the source of magnetic field being fixed in respect to each other} - G01R 33/02: Measuring direction or magnitude of magnetic fields or magnetic flux (G01R33/20 takes precedence) - G01R 33/022: Measuring gradient - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS - G01D: MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract A discrete magnetic angle sensor device according to an embodiment includes a first magnetic field gradiometer and a second magnetic field gradiometer. The first magnetic field gradiometer and the second magnetic field gradiometer are of different types of a group of gradiometer types. An embodiment may improve an accuracy of a determination of a rotation angle. ## Claims ### Claim 1 A discrete magnetic angle sensor device, comprising: a first magnetic field gradiometer; and a second magnetic field gradiometer, wherein the first magnetic field gradiometer and the second magnetic field gradiometer are of different types of a group of gradiometer types, wherein the group of gradiometer types comprises gradiometer types defined by at least an order of the gradiometer of a group of orders, a gradiometer direction of a group of gradiometer directions, a magnetic field component of the magnetic field of a group of magnetic field components, to which the gradiometer is sensitive, and a type of at least one sensor element the gradiometer comprises of a group of types of sensor elements; wherein the group of orders comprises a first order, a second order, a third order and a n-th order, wherein n is an integer larger than 3; wherein the group of gradiometer directions comprises a first gradiometer direction and a second gradiometer direction different from the first gradiometer direction; wherein the group of magnetic field components comprises a first magnetic field component and a second magnetic field component different from the first magnetic field component; and wherein the group of types of sensor elements comprises a vertical Hall-sensor, a horizontal Hall-sensor, a giant magneto-impedance device, a magnetic field effect transistor, a magneto resistor and a magnetoresistive sensor element. ### Claim 2 (depends on 1) The discrete magnetic angle sensor device according to claim 1, wherein the first and second magnetic field gradiometers are formed within or on a main surface of a substrate, the substrate being at least one of a semiconductor substrate, an inorganic substrate and a mono-crystalline substrate. ### Claim 3 (depends on 2) The discrete magnetic angle sensor device according to claim 2, wherein at least one of the first and second gradiometers is of an order higher than one. ### Claim 4 (depends on 1) The discrete magnetic angle sensor device according to claim 1, wherein the first magnetic field component is perpendicular to the main surface of the substrate and the second magnetic field component is parallel to the main surface of the substrate. ### Claim 5 (depends on 1) The discrete magnetic angle sensor device according to claim 1, further comprising a sensor circuit configured to generate a sensor signal indicative of a rotation angle based on a first gradiometer signal of the first magnetic field gradiometer and on a second gradiometer signal of the second magnetic field gradiometer. ### Claim 6 (depends on 1) The discrete magnetic angle sensor device according to claim 1, wherein the first magnetic field component is perpendicular to the second magnetic field component. ### Claim 7 (depends on 1) The discrete magnetic angle sensor device according to claim 1, wherein the first magnetic field gradiometer comprises a first magnetic sensor element and a second magnetic sensor element, which are of a same sensor type of a group of sensor types, and wherein the second magnetic field gradiometer comprises a third magnetic sensor element and a fourth magnetic sensor element, which are of a same sensor type of the group of sensor types, wherein the group of sensor types comprises a vertical Hall-sensor, a horizontal Hall-sensor, a giant magneto-impedance device, a magnetic field effect transistor and a magnetoresistive sensor element. ### Claim 8 (depends on 7) The magnetic angle sensor arrangement according to claim 7, wherein the first gradiometer comprises a first lateral Hall sensor element and a second lateral Hall sensor element, wherein the second gradiometer comprises a first vertical Hall sensor element and a second vertical Hall sensor element. ### Claim 9 A magnetic angle sensor arrangement, comprising: at least one discrete magnetic angle sensor device, the discrete magnetic angle sensor device comprising a first magnetic field gradiometer, a second magnetic field gradiometer, and a sensor circuit configured to generate a sensor signal indicative of a rotation angle based on a first gradiometer signal of the first magnetic field gradiometer and on a second gradiometer signal of the second magnetic field gradiometer, wherein the first magnetic field gradiometer and the second magnetic field gradiometer are of different types of a group of gradiometer types; wherein the at least one discrete magnetic angle sensor device is fixedly arranged with respect to a rotation axis around which at least one magnet is rotatably mountable such that the at least one discrete magnetic angle sensor device is arranged off axis with respect to the rotation axis; wherein the group of gradiometer types comprises gradiometer types defined by at least an order of the gradiometer of a group of orders, a gradiometer direction of a group of gradiometer directions, a magnetic field component of the magnetic field of a group of magnetic field components, to which the gradiometer is sensitive, and a type of at least one sensor element the gradiometer comprises of a group of types of sensor elements; wherein the group of orders comprises a first order, a second order, a third order and a n-th order, wherein n is an integer larger than 3; wherein the group of gradiometer directions comprises a first gradiometer direction and a second gradiometer direction different from the first gradiometer direction; wherein the group of magnetic field components comprises a first magnetic field component and a second magnetic field component different from the first magnetic field component; and wherein the group of types of sensor elements comprises a vertical Hall-sensor, a horizontal Hall-sensor, a giant magneto-impedance device, a magnetic field effect transistor, a magneto resistor and a magnetoresistive sensor element. ### Claim 10 (depends on 9) The magnetic angle sensor arrangement according to claim 9, wherein the sensor circuit is configured to generate the sensor signal also based on at least a radial distance of the first magnetic field gradiometer and a radial distance of the second magnetic field gradiometer from the rotation axis. ### Claim 11 (depends on 9) The magnetic angle sensor arrangement according to claim 9, comprising a plurality of discrete magnetic angle sensor devices arranged according to a predefined pattern around the rotation axis. ### Claim 12 (depends on 11) The magnetic angle sensor arrangement according to claim 11, wherein the plurality of discrete magnetic angle sensor devices are arranged at angle positions of 360°·i/L around the rotation axis with respect to a reference direction, wherein L is an integer larger than or equal to 2 indicative of the number of discrete magnetic angle sensor devices, and i=0, . . . , (L−1) is an integer. ### Claim 13 (depends on 11) The magnetic angle sensor arrangement according to claim 11, wherein the discrete magnetic angle sensor devices are essentially located at a same radial distance to the rotation axis. ### Claim 14 (depends on 11) The magnetic angle sensor arrangement according to claim 11, wherein all discrete sensor devices are located on a plane, which is oriented perpendicular to the rotation axis. ### Claim 15 (depends on 14) The magnetic angle sensor arrangement according to claim 14, wherein all discrete sensor devices are mounted to a single printed circuit board or to two printed circuit boards that are placed side by side and parallel to the plane. ### Claim 16 (depends on 11) The magnetic angle sensor arrangement according to claim 11, wherein the magnetic angle sensor arrangement comprises a control circuit configured to receive the sensor signals from the plurality of discrete magnetic angle sensor devices and to generate an angle signal indicative of the rotation angle of the magnet based on the sensor signals received from the plurality of discrete magnetic angle sensor devices. ### Claim 17 (depends on 11) The magnetic angle sensor arrangement according to claim 11, wherein at least one sensor circuit of at least one of the discrete magnetic angle sensor devices is configured to receive the sensor signals from the other discrete magnetic angle sensor devices of the plurality of discrete magnetic angle sensor devices and to generate the angle signal indicative of the angle of the magnetic field of the magnet based on the sensor signals received from the other discrete magnetic angle sensor devices and based on the determined gradients of the first and second magnetic field components. ### Claim 18 (depends on 16) The magnetic angle sensor arrangement according to claim 16, wherein the sensor signals of the discrete magnetic angle sensor devices comprises information on a ratio of values derivable from the first and second gradiometer signals, and wherein the sensor signals of at least one discrete magnetic angle sensor comprises information on the signs of its respective first and second gradiometer signals. ### Claim 19 (depends on 16) The magnetic angle sensor arrangement according to claim 16, wherein the control circuit or the at least one sensor circuit is further configured to generate a triggering signal, and wherein the discrete magnetic angle sensor devices of the plurality of discrete magnetic angle sensor devices are further configured to generate their respective sensor signals indicative of synchronous measurements based on the triggering signal. ### Claim 20 (depends on 11) The magnetic angle sensor arrangement according to claim 11, wherein the control circuit or the at least one sensor circuit is configured to generate the angle signal based on averaging the angles derivable from the sensor signals. ### Claim 21 (depends on 11) The magnetic angle sensor arrangement according to claim 11, wherein the discrete magnetic angle sensor devices are configured to generate the sensor signal based on the gradient of the first magnetic field component with respect to a first gradiometer direction of the discrete magnetic angle sensor device, and wherein the discrete magnetic angle sensor devices are configured to generate the sensor signal based on the gradient of the second magnetic field component with respect to the first gradiometer direction of the discrete magnetic angle sensor device or with respect to a second gradiometer direction of the discrete magnetic angle sensor device different from the first gradiometer direction of the discrete magnetic angle sensor device, wherein the discrete magnetic angle sensor devices are arranged such that all first magnetic field components are of a same type of magnetic field component and all second magnetic field components are of a same type of magnetic field component, wherein the group of magnetic field components comprises an axial component with respect to the rotation axis and the position of the respective discrete magnetic angle sensor device, a radial component with respect to the rotation axis and the position of the respective discrete magnetic angle sensor device, and a tangential component with respect to the rotation axis and the position of the respective discrete magnetic angle sensor device, and wherein all first gradiometer directions are of a same type of direction and all second gradiometer directions are of a same type of direction, wherein a group of types of directions comprises an axial direction with respect to the rotation axis and the position of the respective discrete magnetic angle sensor device, a radial direction with respect to the rotation axis and the position of the respective discrete magnetic angle sensor device, and a tangential direction with respect to the rotation axis and the position of the respective discrete magnetic angle sensor device. ### Claim 22 (depends on 9) The magnetic angle sensor arrangement according to claim 9, wherein the plurality of discrete magnetic sensor devices comprises two discrete magnetic sensor devices arranged at an angle of 180° with respect to each other around the rotation axis such that a connecting line connecting the two discrete magnetic sensor devices intersects the rotation axis. ### Claim 23 (depends on 9) The magnetic angle sensor arrangement according to claim 9, further comprising the rotatably mounted magnet, the magnet comprising an essentially diametrical magnetization oriented such that the magnetization is essentially oriented perpendicular to the rotation axis. ### Claim 24 (depends on 23) The magnetic angle sensor arrangement according to claim 23, wherein the magnet comprises a rotational symmetry or an M-fold rotational symmetriy, wherein M is an integer being equal to or larger than a number of discrete magnetic angle sensor devices. ### Claim 25 (depends on 9) The magnetic angle sensor arrangement according to claim 9, wherein the first gradiometer comprises a first lateral Hall sensor element and a second lateral Hall sensor element, wherein the second gradiometer comprises a first vertical Hall sensor element and a second vertical Hall sensor element, and wherein the at least one discrete magnetic angle sensor device is arranged such that an amplitude of a gradient of a first magnetic field component to be detected by the first gradiometer is smaller than an amplitude of a gradient of a second field component to be detected by the second gradiometer with respect to a maximum specified rotation angle range of the at least one magnet. ### Claim 26 A discrete magnetic angle sensor device, comprising: a first magnetic field gradiometer; and a second magnetic field gradiometer, wherein the first magnetic field gradiometer and the second magnetic field gradiometer are of different types of a group of gradiometer types, wherein the first and second magnetic field gradiometers are formed within or on a main surface of a substrate, the substrate being at least one of a semiconductor substrate, an inorganic substrate and a mono-crystalline substrate, and wherein the sensor circuit is configured to generate the sensor signal based on a combination of the first and second gradiometer signals such that common multiplicative factors are canceled out. ### Claim 27 A discrete magnetic angle sensor device, comprising: a first magnetic field gradiometer; and a second magnetic field gradiometer, wherein the first magnetic field gradiometer and the second magnetic field gradiometer are of different types of a group of gradiometer types, wherein the first and second magnetic field gradiometers are formed within or on a main surface of a substrate, the substrate being at least one of a semiconductor substrate, an inorganic substrate and a mono-crystalline substrate, and wherein the discrete magnetic angle sensor device is configured to generate the sensor signal based on the gradient of the first magnetic field component with respect to a first gradiometer direction, and wherein the discrete magnetic angle sensor device is configured to generate the sensor signal based on the gradient of the second magnetic field component with respect to the first gradiometer direction or with respect to a second gradiometer direction different from the first gradiometer direction.