Reaction products of guanidine compounds or salts thereof, polyepoxides and polyhalogens
AssigneeRohm and Haas Electronic Materials LLC
InventorsJulia Kozhukh, Zuhra I. Niazimbetova, Maria Anna Rzeznik
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Abstract
Reaction products of guanidine compounds or salts thereof, polyepoxide compounds and polyhalogen compounds may be used as levelers in metal electroplating baths, such as copper electroplating baths, to provide good throwing power. Such reaction products may plate with good surface properties of the metal deposits and good physical reliability.
Claims9
A composition comprising one or more sources of metal ions, and one or more compounds comprising a reaction product of one or more guanidine compounds or salts thereof, one or more polyepoxide compounds and one or more polyhalogen compounds wherein the one or more polyhalogens have a formula:
- X1—R16—X2 (VII)
- wherein X1 and X2 may be the same or different and are halogens chosen from chlorine, bromine, fluorine and iodine;
- R16 is a moiety having formula:
- —CH2—R17—CH2— (VIII)
- wherein R17 is a linear or branched, substituted or unsubstituted (C1-C18)alkyl, substituted or unsubstituted (C6-C12)cycloalkyl, substituted or unsubstituted (C.sub.6-C15)aryl, —CH2—O—(R18—O)q—CH2— where R18 is a substituted or unsubstituted, linear or branched (C2-C10)alkyl and q is an integer of 1-10.
Dependencies are inferred from the claim text.