# US 9,435,030 B2 · Radical reactor with inverted orientation > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,435,030 B2 - Document ID: US9435030B2 - Status: Granted - Kind: B2 - Application number: 14/398,898 - Filed: 2013-04-29 - Published: 2015-05-07 - Granted: 2016-09-06 - Earliest claimed: 2012-05-04 - Assignees: Veeco ALD Inc. - Applicants: Veeco Ald Inc. - Inventors: Daniel Ho Lee; Samuel S. Pak; Hyoseok Yang; Sang In Lee - Web page: https://patentgrep.com/patent/US9435030B2 ## CPC - C23C 16/4412: {Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps} - C23C 16/4488: {by in situ generation of reactive gas by chemical or electrochemical reaction} - C23C 16/452: by activating reactive gas streams before {their} introduction into the reaction chamber, e.g. by {ionisation} or addition of reactive species - C23C 16/4583: {the substrate being supported substantially horizontally} - C23C 16/50: using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} - H01J 37/3244: {Gas supply means} - H01J 37/32458: {Vessel} - H01J 37/32568: {Relative arrangement or disposition of electrodes; moving means} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A radical reactor including an elongated structure received within a chamber of a body of the radical reactor. Radicals are generated within a radical chamber formed in the elongated structure by applying a voltage signal across the elongated structure and an electrode extending within the radical chamber. The radicals generated in the radical chamber are routed via a discharge port of the elongated structure and a conduit formed in the body of the radical reactor onto the substrate. The discharge port and the conduit are not aligned so that irradiation generated in the radical chamber is not directed to the substrate. ## Claims ### Claim 1 A radical reactor for injecting radicals to a substrate, comprising: a body formed with a cavity extending across the body and a conduit from the cavity to a surface of the body facing a substrate passing across the radical reactor; and an elongated structure contained in the cavity, the elongated structure formed with a radical chamber for receiving gas through a passage in the elongated structure and generating radicals by disassociating the received gas, wherein the radicals are discharged from the elongated structure into the cavity via a discharge port not aligned with the conduit of the body to prevent irradiation generated in the radical chamber from reaching the substrate. ### Claim 2 (depends on 1) The radical reactor of claim 1, further comprising an electrode extending across a length of the elongated structure, a voltage signal applied across the elongated structure and the electrode to generate the radicals. ### Claim 3 (depends on 1) The radical reactor of claim 1, wherein the conduit is configured to discharge the radicals onto the substrate from a first side of the radical reactor, and the discharge port is formed in the elongated structure to open towards a second side of the radical reactor opposite to the first side of the radical reactor. ### Claim 4 (depends on 3) The radical reactor of claim 3, wherein the first side is a bottom of the radical reactor and the second side is a top of the radical reactor. ### Claim 5 (depends on 1) The radical reactor of claim 1, wherein paths from the discharge port to the conduit are provided at both sides of the elongated structure. ### Claim 6 (depends on 1) The radical reactor of claim 1, wherein the passage comprises a channel extending lengthwise across the elongated structure and perforations connecting the channel and the radical chamber. ### Claim 7 (depends on 1) The radical reactor of claim 1, wherein the elongated structure is separate and removable from the body. ### Claim 8 (depends on 1) The radical reactor of claim 1, wherein the elongated structure is integrated with the body. ### Claim 9 A deposition apparatus comprising: an injector for injecting gas onto a substrate; and a radical reactor for injecting radicals onto the substrate, comprising: a body formed with a cavity extending across the body and a conduit from the cavity to a surface of the body facing a substrate passing across the radical reactor, and an elongated structure contained in the cavity, the elongated structure formed with a radical chamber for receiving gas through a passage in the elongated structure and generating radicals by disassociating the received gas, wherein the radicals are discharged from the elongated structure into the cavity via a discharge port not aligned with the conduit of the body. ### Claim 10 (depends on 9) The deposition apparatus of claim 9, wherein the radical reactor further comprises an electrode extending across a length of the elongated structure, a voltage signal applied across the elongated structure and the electrode to generate the radicals. ### Claim 11 (depends on 9) The deposition apparatus of claim 9, wherein the conduit is configured to discharge the radicals onto the substrate from a first side of the radical reactor, and the discharge port is formed in the elongated structure to open towards a second side of the radical reactor opposite to the first side of the radical reactor. ### Claim 12 (depends on 11) The deposition apparatus of claim 11, wherein the first side is a bottom of the radical reactor and the second side is a top of the radical reactor. ### Claim 13 (depends on 9) The deposition apparatus of claim 9, wherein paths from the discharge port to the conduit are provided at both sides of the elongated structure. ### Claim 14 (depends on 9) The deposition apparatus of claim 9, wherein the passage comprises a channel extending lengthwise across the elongated structure and perforations connecting the channel and the radical chamber. ### Claim 15 (depends on 9) The deposition apparatus of claim 9, wherein the elongated structure is separate from and removable from the body. ### Claim 16 (depends on 9) The deposition apparatus of claim 9, wherein the elongated structure is integrated with the body.