# US 9,435,020 B2 · Thin film deposition apparatus and method of forming thin film using the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,435,020 B2 - Document ID: US9435020B2 - Status: Granted - Kind: B2 - Application number: 14/740,201 - Filed: 2015-06-15 - Published: 2015-10-01 - Granted: 2016-09-06 - Earliest claimed: 2013-04-15 - Assignees: Samsung Display Co., Ltd. - Applicants: Samsung Display Co., Ltd. - Inventors: Sang-Yong Jeong; Myung-Ki Lee; Sang-Youn Kim; You-Sung Jeon - Web page: https://patentgrep.com/patent/US9435020B2 ## CPC - C23C 14/042: {using masks} - C23C 14/54: Controlling or regulating the coating process - G01B 11/14: for measuring distance or clearance between spaced objects or spaced apertures (G01B11/26 takes precedence; rangefinders G01C3/00) - H10K 71/166: {using selective deposition, e.g. using a mask} - H10P 72/0616: {Monitoring of warpages, curvatures, damages, defects or the like} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A thin film deposition apparatus includes: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig. Another thin film deposition apparatus includes a chamber, a mask stage positioned within the chamber and configured to support a mask, a camera part proximate to a side of the mask stage, and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part. The jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part. ## Claims ### Claim 1 A thin film deposition apparatus comprising: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage and comprising a laser radiating part configured to radiate a laser beam at the mask stage or the mask; and a rail in the chamber and configured to support the movement of the jig. ### Claim 2 (depends on 1) The thin film deposition apparatus of claim 1, wherein the rail comprises a pair of rails that are parallel to each other and to edges of the mask stage. ### Claim 3 (depends on 2) The thin film deposition apparatus of claim 2, wherein the jig is connected to the pair of rails by a connecting part, and the connecting part comprises a driving part for moving the jig. ### Claim 4 A thin film deposition apparatus comprising: a chamber; a mask stage in the chamber and configured to support a mask; a jig in the chamber and above the mask stage, the jig being configured to move in a direction of the mask stage; and a rail in the chamber and configured to support the movement of the jig, wherein the jig is configured to radiate one or more laser beams in a downward direction from the jig to obtain data regarding a structure under the jig. ### Claim 5 (depends on 4) The thin film deposition apparatus of claim 4, further comprising a controller configured to receive scanning data regarding the structure from the jig. ### Claim 6 (depends on 5) The thin film deposition apparatus of claim 5, wherein the structure is the mask stage, the jig is further configured to radiate the laser beams onto an upper surface of the mask stage, and the controller is further configured to determine flatness and tilting of the mask stage from the scanning data. ### Claim 7 (depends on 5) The thin film deposition apparatus of claim 5, wherein the mask is mounted on the mask stage, the structure is the mask, the jig is further configured to radiate the laser beams onto a surface of the mask, and the controller is further configured to determine flatness of the mask from the scanning data. ### Claim 8 (depends on 5) The thin film deposition apparatus of claim 5, further comprising a camera part proximate to a side of the mask stage, wherein the jig is further configured to move over the camera part. ### Claim 9 (depends on 8) The thin film deposition apparatus of claim 8, wherein the structure is the camera part, and the jig is further configured to radiate the laser beams onto the camera part to obtain the scanning data. ### Claim 10 (depends on 9) The thin film deposition apparatus of claim 9, wherein the controller is further configured to determine a change in position of the camera part from the scanning data. ### Claim 11 A thin film deposition apparatus comprising: a chamber; a mask stage positioned within the chamber and configured to support a mask; a camera part proximate to a side of the mask stage; and a jig above the mask stage and configured to move in a direction of the mask stage and over the camera part, wherein the jig is further configured to radiate laser beams in a downward direction from the jig to obtain first scanning data regarding the mask stage and second scanning data regarding the camera part. ### Claim 12 (depends on 11) The thin film deposition apparatus of claim 11, further comprising a controller configured to receive the first and second scanning data. ### Claim 13 (depends on 12) The thin film deposition apparatus of claim 12, wherein the controller is further configured to determine flatness or tilting of the mask stage from the first scanning data. ### Claim 14 (depends on 13) The thin film deposition apparatus of claim 13, wherein the controller is further configured to determine a change in position of the camera part by comparing the first and second scanning data with reference position data. ### Claim 15 (depends on 11) The thin film deposition apparatus of claim 11, further comprising a pair of rails parallel to sides of the mask stage, wherein the jig is configured to move along the pair of rails. ### Claim 16 (depends on 15) The thin film deposition apparatus of claim 15, wherein the jig is connected to the pair of rails by a connecting part, and the connecting part comprises a driving part for moving the jig.