# US 9,434,983 B2 · Nano-sensor array

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- Number: US 9,434,983 B2
- Document ID: US9434983B2
- Status: Granted
- Kind: B2
- Application number: 14/081,358
- Filed: 2013-11-15
- Published: 2014-03-13
- Granted: 2016-09-06
- Earliest claimed: 2011-05-27
- Assignees: The Board of Trustees of the Leland Stanford Junior University
- Applicants: The Board of Trustees of the Leland Stanford Junior University
- Inventors: Hesaam Esfandyarpour
- Web page: https://patentgrep.com/patent/US9434983B2

## CPC

- C12Q 1/6825: Nucleic acid detection involving sensors
- C40B 60/12: for screening libraries
- G01N 27/3278: {involving nanosized elements, e.g. nanogaps or nanoparticles (nanopores G01N33/48721; magnetic beads G01N27/745)}
- G01N 33/49: Blood {(chemical methods for determining blood cell populations G01N33/5094; chemical analysis of blood groups or blood types G01N33/80)}
- B82Y 15/00: Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
- B82Y 40/00: Manufacture or treatment of nanostructures
- Y10T 29/49826: Assembling or joining
- C12Q: MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS (immunoassay G01N33/53); COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
- C40B: COMBINATORIAL CHEMISTRY; LIBRARIES, e.g. CHEMICAL LIBRARIES (in silico combinatorial libraries of nucleic acids, proteins or peptides G16B35/00; in silico combinatorial chemistry G16C20/60)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

In one embodiment, a method is provided for the manufacture of a nano-sensor array. A base having a sensing region is provided along with a plurality of nano-sensors. Each of the plurality of nano-sensors is formed by: forming a first nanoneedle along a surface of the base, forming a dielectric on the first nanoneedle, and forming a second nanoneedle on the dielectric layer. The first nanoneedle of each sensor has a first end adjacent to the sensing region of the base. The second nanoneedle is separated from the first nanoneedle by the dielectric and has a first end adjacent the first end of the first nanoneedle. The base is provided with a fluidic channel. The plurality of nano-sensors and the fluidic channel are configured and arranged with the first ends proximate the fluidic channel to facilitate sensing of targeted matter in the fluidic channel.

## Claims

### Claim 1

A nano-sensor apparatus, comprising:
a base;
a channel proximate to the base and configured to pass target particles via fluidic pressure;
a plurality of nano-sensors wherein each nano-sensor of the plurality of nano-sensors includes:
a first nanoneedle and a second nanoneedle, wherein the first and second nanoneedles are separated by a solid state dielectric and have ends that are adjacent to one another, and the second nanoneedle is disposed vertically above the first nanoneedle in relation to the base; and
a detection circuit coupled to each of said nanoneedles, wherein the detection circuit is configured to detect a change in impedance between the first and second nanoneedles of each nano-sensor that results from the binding of a target particle passed by the channel to a respective probe.

### Claim 2 (depends on 1)

The nano-sensor apparatus of claim 1, wherein said probe is provided on one of the first and second nanoneedles.

### Claim 3 (depends on 1)

The nano-sensor apparatus of claim 1, wherein the detection circuit is further configured to detect a second particle bound to the target particle passed by the channel.

### Claim 4 (depends on 2)

The nano-sensor apparatus of claim 2, wherein the detection circuit is configured to determine the number of target particles bound to the respective probe.

### Claim 5 (depends on 2)

The nano-sensor apparatus of claim 2, wherein each probe in a first subset of the plurality of nano-sensors is configured to bind to a first type of target particle and each probe in a second subset of the plurality of nano-sensors is configured to bind to a second type of target particle and to not bind to the first type of target particle.

### Claim 6 (depends on 2)

The nano-sensor apparatus of claim 2, wherein the second nanoneedle of each nano-sensor is disposed along a surface of the base.

### Claim 7 (depends on 2)

The nano-sensor apparatus of claim 2, wherein the second nanoneedle of each nano-sensor is disposed parallel in relation to the first nanoneedle of each corresponding nanosensor.

### Claim 8 (depends on 2)

The nano-sensor apparatus of claim 2, wherein the solid state dielectric has a thickness that separates the first and second nanoneedles by 500 nm or less.

### Claim 9 (depends on 3)

The nano-sensor apparatus of claim 3, wherein the second particle is a bead.