# US 9,434,603 B2 · Physical quantity sensor, electronic apparatus, and moving object > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,434,603 B2 - Document ID: US9434603B2 - Status: Granted - Kind: B2 - Application number: 14/256,239 - Filed: 2014-04-18 - Published: 2014-10-23 - Granted: 2016-09-06 - Earliest claimed: 2013-04-23 - Assignees: Seiko Epson Corporation - Applicants: Seiko Epson Corporation - Inventors: Yutaka Takada - Web page: https://patentgrep.com/patent/US9434603B2 ## CPC - B81B 7/0064: {for protecting against electromagnetic or electrostatic interferences} - B81C 1/00253: {Processes for integrating an electronic processing unit with a micromechanical structure not provided for in B81C1/0023 - B81C1/00246} - G01C 19/5628: Manufacturing; Trimming; Mounting; Housings - G01P 1/023: {for acceleration measuring devices} - G01P 15/08: with conversion into electric or magnetic values - B81B 2201/0235: Accelerometers - B81B 2201/0242: Gyroscopes - B81B 2207/07: Interconnects - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01) - G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S) - G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G}) ## Abstract A physical quantity sensor includes a sensor element, an integrated circuit that is electrically connected to the sensor element, and a ceramic package (base body) on which the integrated circuit is mounted. A first conductor pattern (interconnection pattern) for electrical connection with the outside is provided on one surface of the ceramic package. A second conductor pattern is provided to be electrically connected to the interconnection pattern. The second conductor pattern includes an interconnection pattern that passes through the inside of the ceramic package, and a metallized region that is exposed on the other surface of the ceramic package. The interconnection pattern is longer than a distance between the one surface and the other surface of the ceramic package. ## Claims ### Claim 1 A physical quantity sensor comprising: a sensor element; an integrated circuit that is electrically connected to the sensor element; and a base body including a plurality of substrates on which the integrated circuit is mounted, the plurality of substrates including a first substrate and a second substrate, and the first substrate and the second substrate being adjacent to one another, wherein a first conductor pattern for electrical connection with the outside is disposed on one surface of the base body, a second conductor pattern is disposed to be electrically connected to the first conductor pattern and the integrated circuit, the second conductor pattern includes a first interconnection pattern that is disposed inside the base body between the first and second substrates, the first interconnection pattern being electrically connected between the integrated circuit and the first conductor pattern, and a second interconnection pattern that is disposed on the other surface of the base body, and the first interconnection pattern is longer than a distance between the one surface and the other surface, the integrated circuit includes a terminal for serial communication or power supply voltage, the second conductor pattern is electrically connected to the terminal, and at least a part of the second conductor pattern is constituted by a material having a sheet resistance value higher than a sheet resistance value of the first conductor pattern. ### Claim 2 (depends on 1) The physical quantity sensor according to claim 1, wherein in a plan view of the base body, the first interconnection pattern extends at least from the one end side of the integrated circuit to the other end side. ### Claim 3 (depends on 1) The physical quantity sensor according to claim 1, wherein the first interconnection pattern includes a linear shape. ### Claim 4 (depends on 1) The physical quantity sensor according to claim 1, wherein at least a part of the first interconnection pattern has a meandering shape. ### Claim 5 (depends on 1) The physical quantity sensor according to claim 1, wherein the first interconnection pattern includes a plurality of third interconnection patterns that are provided between the first substrate and the second substrate, a plurality of fourth interconnection patterns which are disposed at the first substrate and which are provided on a side opposite to the plurality of third interconnection patterns in the first substrate, and a plurality of vias that electrically connect the plurality of third interconnection patterns and the plurality of fourth interconnection patterns, respectively, and the first interconnection pattern includes a meandering shape in a side view of the base body. ### Claim 6 (depends on 1) The physical quantity sensor according to claim 1, wherein the first interconnection pattern includes a plurality of third interconnection patterns that are provided between the first substrate and the second substrate, a plurality of fourth interconnection patterns which are disposed at the first substrate and which are provided on a side opposite to the plurality of third interconnection patterns in the first substrate, and a plurality of vias that electrically connect the plurality of third interconnection patterns and the plurality of fourth interconnection patterns, respectively, and the first interconnection pattern includes a meandering shape in a plan view of the base body. ### Claim 7 (depends on 1) The physical quantity sensor according to claim 1, wherein a third conductor pattern having a constant potential is provided inside the base body, and the third conductor pattern is provided at least at both sides of the first interconnection pattern. ### Claim 8 (depends on 1) An electronic apparatus comprising: the physical quantity sensor according to claim 1. ### Claim 9 (depends on 1) A moving object comprising: the physical quantity sensor according to claim 1. ### Claim 10 (depends on 1) The physical quantity sensor according to claim 1, wherein the first interconnection pattern includes an fifth interconnection pattern that is provided between the first substrate and the second substrate, the fifth interconnection pattern is longer than a distance between the one surface and the other surface. ### Claim 11 (depends on 2) An electronic apparatus comprising: the physical quantity sensor according to claim 2. ### Claim 12 (depends on 2) A moving object comprising: the physical quantity sensor according to claim 2.