Apparatus and methods for micro-transfer-printing

A method for assembling a semiconductor device on a receiving surface of a destination substrate by micro-transfer printing, the method comprising:

• Providing the semiconductor device formed on a native substrate;
• contacting a top surface of the semiconductor device with a conformable transfer device having a contact surface, wherein contact between the contact surface and the top surface of the semiconductor device at least temporarily binds the semiconductor device to the conformable transfer device;
• separating the semiconductor device from the native substrate such that the contact surface of the conformable transfer device has the semiconductor device disposed thereon with the semiconductor device released from the native substrate;
• prior to contacting the semiconductor device with the receiving surface of the destination substrate, exposing a backside surface of the semiconductor device to a plasma including atmospheric plasma following separation from the native substrate;
• contacting the semiconductor device disposed on the contact surface with the receiving surface of the destination substrate;
• and
• separating the contact surface of the conformable transfer device from the semiconductor device, thereby micro-transfer printing assembling the semiconductor device onto on the receiving surface of the destination substrate, wherein the semiconductor device is micro-transfer printed onto the receiving surface of the destination substrate such that a metal backside surface of the semiconductor device at least partially contacts a flux layer on the destination substrate;
• and
• after assembling the semiconductor device on the receiving surface of the destination substrate, thermally treating the flux layer, thereby securing the metal backside surface to the metal pad.