# US 9,434,093 B2 · Method of manufacturing master mold > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,434,093 B2 - Document ID: US9434093B2 - Status: Granted - Kind: B2 - Application number: 14/557,712 - Filed: 2014-12-02 - Published: 2015-11-05 - Granted: 2016-09-06 - Earliest claimed: 2014-05-02 - Assignees: Samsung Electronics Co., Ltd. - Applicants: Samsung Electronics Co., Ltd. - Inventors: Sukgyu Hahm; Dongouk Kim; Joonyong Park; Jihyun Bae; Bongsu Shin; Sunghoon Lee; Hongseok Lee; Jaeseung Chung - Web page: https://patentgrep.com/patent/US9434093B2 ## CPC - B29C 33/3878: {used as masters for making successive impressions} - G03F 7/00: Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (using photoresist structures for special production processes, see the relevant places, e.g. B44C, H10P76/00, H05K) - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - B29C 33/424: {Moulding surfaces provided with means for marking or patterning (for injection moulding B29C45/372)} - B29C 2033/426: {Stampers} - B29K 2101/10: Thermosetting resins - B29L 2031/757: {Moulds, cores, dies} - B29C: SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING (making preforms B29B11/00; making laminated products by combining previously unconnected layers which become one product whose layers will remain together B32B37/00 - B32B41/00) - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - B29K: INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR {MOULDS, } REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS - B29L: INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES ## Abstract A method of manufacturing a master mold includes forming a plurality of replica resin layers using a mold; forming a replica template by bonding the plurality of replica resin layers on a template; forming a replica mold layer having a pattern corresponding to a pattern of the plurality of replica resin layers using the replica template; forming a flexible stamp having a pattern formed on a surface thereof using the replica mold layer; transferring the pattern formed on the surface of the flexible stamp to a mold resin; and forming a large area master mold by etching a surface of a substrate based on a pattern shape of the mold resin. ## Claims ### Claim 1 A method of manufacturing a master mold, the method comprising: forming a plurality of replica resin layers using a mold; forming a replica template by bonding the plurality of replica resin layers on a template; separating the mold from the plurality of replica resin layer, forming a replica mold layer having a pattern corresponding to a pattern of the plurality of replica resin layers using the replica template; forming a flexible stamp having a pattern formed on a surface thereof using the replica mold layer; transferring the pattern formed on the surface of the flexible stamp to a mold resin; and forming the master mold having a large area by etching a surface of a substrate based on a pattern shape of the mold resin, wherein the mold is separated from the plurality of replica resin layer by bonding a surface of the plurality of replica resin layer, on which the pattern of the plurality of replica resin layers is not formed, to an adhesive layer on the template. ### Claim 2 (depends on 1) The method claim 1, wherein the forming the replica template comprises bonding the plurality of replica resin layers on the template after the forming the plurality of replica resin layers using the mold. ### Claim 3 (depends on 1) The method claim 1, wherein the forming the plurality of replica resin layers comprises using a plurality of molds. ### Claim 4 (depends on 1) The method claim 1, wherein the plurality of replica resin layers are aligned with each other and bonded on the template, and at least a portion of each of the plurality of replica resin layers overlaps another replica resin layer. ### Claim 5 (depends on 1) The method claim 1, wherein the forming the flexible stamp comprises using a capillary force lithography. ### Claim 6 (depends on 1) The method claim 1, wherein the transferring the pattern formed on the surface of the flexible stamp to the mold resin comprises: disposing the flexible stamp on a flexible plate; and applying a pressure on the flexible plate toward the mold resin provided on the substrate. ### Claim 7 A method of manufacturing a master mold, the method comprising: forming a plurality of replica resin layers using a mold; forming a replica template by bonding the plurality of replica resin layers on a template; separating the mold from the plurality of replica resin layer, forming a first photoresist layer having a pattern corresponding to a pattern of the plurality of replica resin layers; forming a second photoresist layer having a pattern corresponding to the pattern of the first photoresist layer on the first photoresist layer; disposing the second photoresist layer on a substrate; separating the second photoresist layer from the first photoresist layer; and forming the master mold having a large area by etching a surface of the substrate based on the pattern shape of the second photoresist layer, wherein the mold is separated from the plurality of replica resin layer by bonding a surface of the plurality of replica resin layer, on which the pattern of the plurality of replica resin layers is not formed, to an adhesive layer on the template. ### Claim 8 (depends on 7) The method of claim 7, wherein the forming the replica template comprises bonding the plurality of replica resin layers on the template after the forming the plurality of replica resin layers using the mold. ### Claim 9 (depends on 7) The method of claim 7, wherein the forming the plurality of replica resin layers comprises using a plurality of molds. ### Claim 10 (depends on 7) The method of claim 7, wherein the plurality of replica resin layers are aligned with each other and bonded on the template, and at least a portion of each of the plurality of replica resin layers overlaps another replica resin layer. ### Claim 11 (depends on 7) The method claim 7, further comprising: bonding a flexible plate on the first photoresist layer; and separating the first photoresist layer from the replica template after the first photoresist layer is formed on the replica template. ### Claim 12 (depends on 11) The method claim 11, further comprising: providing an adhesive layer between the first photoresist layer and the flexible plate. ### Claim 13 (depends on 7) The method of claim 7, wherein the first photoresist layer and the second photoresist layer are formed of different materials from each other.