# US 9,434,047 B2 · Retainer ring

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- Number: US 9,434,047 B2
- Document ID: US9434047B2
- Status: Granted
- Kind: B2
- Application number: 13/715,694
- Filed: 2012-12-14
- Published: 2014-05-15
- Granted: 2016-09-06
- Earliest claimed: 2012-11-14
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Company, Ltd.
- Inventors: Kuo-Cheng Lien; Hsin-Hsien Lu
- Web page: https://patentgrep.com/patent/US9434047B2

## CPC

- B24B 37/32: Retaining rings
- B24B 41/067: {radially supporting workpieces}
- B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS

## Abstract

A retainer ring for chemical-mechanical polishing or other processes includes an outside ring and an inside ring that is attached to the outside ring. The inside ring is softer than the outside ring in hardness.

## Claims

### Claim 1

A retainer ring, comprising:
an outside ring with a recess along an inner surface of the outside ring; and
an inside ring with a jut extending from an outer surface of the inside ring into the recess, the inside ring being attached to the outside ring by friction between the jut and the recess,
wherein the jut has a first width at a first location and a second width at a second location, the second location being interposed between the first location and the outer surface of the inside ring, the first width being greater than the second width, and
wherein the inside ring is softer than the outside ring in hardness.

### Claim 2 (depends on 1)

The retainer ring of claim 1, wherein the inside ring has a hardness ranging from 15 to 105 in Shore A hardness scale.

### Claim 3 (depends on 1)

The retainer ring of claim 1, wherein the inside ring has a thickness ranging from 0.2 mm to 5 mm.

### Claim 4 (depends on 1)

The retainer ring of claim 1, wherein the inside ring comprises polyurethane, polyester, polyether, polycarbonate, or any combination thereof.

### Claim 5 (depends on 1)

The retainer ring of claim 1, wherein the outside ring has a hardness ranging from 95 to 110 in Rockwell M hardness scale.

### Claim 6 (depends on 1)

The retainer ring of claim 1, wherein the outside ring has a thickness ranging from 5 mm to 20 mm.

### Claim 7 (depends on 1)

The retainer ring of claim 1, wherein the outside ring comprises polyether ether ketone (PEEK), polyphenylene sulfide (PPS), or any combination thereof.

### Claim 8 (depends on 1)

The retainer ring of claim 1, wherein the retainer ring has a height ranging from 10 mm to 20 mm.

### Claim 9 (depends on 1)

The retainer ring of claim 1, wherein the inside ring is configured to absorb impact energy and reduce vibrations between the retainer ring and a wafer inside the retainer ring during a chemical mechanical planarization (CMP) process.

### Claim 10

A retainer ring, comprising:
an outside ring; and
an inside ring attached to the outside ring by a friction fitting between a protrusion of the inside ring and a groove of the outside ring, the protrusion having a first width at a first location and a second width at a second location, the first width being less than the second width, the second location being more a distal location of the protrusion from an innermost edge of the inside ring than the first location,
wherein the protrusion extends from an outer sidewall of the inside ring into the groove disposed along an inner sidewall of the outside ring,
wherein the inside ring is softer than the outside ring in hardness.

### Claim 11 (depends on 10)

The retainer ring of claim 10, wherein the inside ring comprises polyurethane, polyester, polyether, polycarbonate, or any combination thereof.

### Claim 12 (depends on 10)

The retainer ring of claim 10, wherein the outside ring has a hardness ranging from 95 to 110 in Rockwell M hardness scale.

### Claim 13 (depends on 10)

The retainer ring of claim 10, wherein the outside ring comprises polyether ether ketone (PEEK), polyphenylene sulfide (PPS), or any combination thereof.

### Claim 14 (depends on 10)

The retainer ring of claim 10, wherein a thickness of the outside ring is in a range from about 5 mm to about 20 mm.

### Claim 15 (depends on 10)

The retaining ring of claim 10, wherein a height of the retaining ring is in a range from about 10 mm to about 20 mm.

### Claim 16

A retainer ring comprising:
an outside ring having a first hardness;
an inside ring having a second hardness, the second hardness being less than the first hardness; and
an attachment mechanism connecting the outside ring and the inside ring, comprising:
a groove along an inner surface of the outside ring; and
a protrusion of the inside ring configured to fit within the groove and form a friction fitting, the protrusion having a width that increases as the protrusion extends outward.

### Claim 17 (depends on 16)

The retainer ring of claim 16, wherein the retaining ring has a height from about 10 mm to about 20 mm.

### Claim 18 (depends on 16)

The retainer ring of claim 16, wherein the first hardness is in a range of from about 95 to about 100 in Rockwell M hardness scale and the second hardness is in a range of from about 15 to 105 in Shore A hardness scale.

### Claim 19 (depends on 16)

The retainer ring of claim 16, wherein the inside ring comprises polyurethane, polyester, polyether, polycarbonate, or any combination thereof, and the outside ring comprises polyether ether ketone (PEEK), polyphenylene sulfide (PPS), or any combination thereof.

### Claim 20 (depends on 16)

The retainer ring of claim 16, wherein the inside ring has a thickness from about 0.2 mm to about 5 mm, and the outside ring has a thickness from about 5 mm to about 20 mm.