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US 9,433,068 B2Granted
Discharge electrodes for use in a light source device
AssigneeUshio Denki Kabushiki Kaisha
InventorTakahiro Shirai
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AssigneeUshio Denki Kabushiki Kaisha
InventorTakahiro Shirai
Estimating the term…
Each of two discharge electrodes is partially immersed in a container, and rotations of the electrode cause a high-temperature plasma material adhering to the electrode to be conveyed into a discharge space. EUV light is emitted by generating a pulse discharge between the electrodes in a state where the high-temperature plasma material is vaporized. A plurality of capturing grooves for capturing the high-temperature plasma material are provided in the form of a plurality of concentric circles near the outer periphery of each discharge electrode. When each discharge electrode rotates, the high-temperature plasma material, which adheres to an area unnecessary for plasma generation, flows into the capturing grooves. As a result, the film thickness of the high-temperature plasma material does not increase very much at the outer periphery of each electrode, and it is possible to suppress the scattering of the high-temperature plasma material into a chamber interior.
A pair of discharge electrodes for use in a light source device including a pulse electric power feeding unit configured to feed a pulse electric power to the pair of discharge electrodes, material feeding units configured to feed a material for light emission, onto the pair of discharge electrodes respectively, and an energy beam irradiation unit configured to irradiate the material on a curved surface of each said discharge electrode with an energy beam to vaporize the material, each of the material feeding units having a container to retain a melt of the material,
A pair of discharge electrodes for use in a light source device including a pulse electric power feeding unit configured to feed a pulse electric power to the pair of discharge electrodes, material feeding units configured to feed a material for light emission, onto the pair of discharge electrodes respectively, and an energy beam irradiation unit configured to irradiate the material at an outer periphery of each said discharge electrode with an energy beam to vaporize the material, each of the material feeding units having a container to retain a melt of the material,
A light source device comprising:
Dependencies are inferred from the claim text.