Monolithic composite resonator devices with reduced sensitivity to acceleration and vibration

An integrated circuit device, comprising:

• a plurality of serially-connected resonators;
• and
• a programmable negative impedance converter (NIC) configured to mimic a negative capacitive reactance, said programmable NIC having at least a first terminal electrically connected to a first of said plurality of serially-connected resonators;
• wherein said programmable NIC is a one-time programmable and temperature-compensated NIC, which is electrically connected across the first of said plurality of serially-connected resonators and is responsive to a reference voltage having a magnitude that varies in response to changes in temperature in the integrated circuit device.

An integrated circuit device, comprising:

• a plurality of serially-connected resonators;
• a programmable negative impedance converter (NIC) configured to mimic a negative capacitive reactance, said programmable NIC having at least a first terminal electrically connected to a first of said plurality of serially-connected resonators;
• and
• an integrated circuit substrate having an at least two-piece package thereon with a sealed cavity therein containing said plurality of serially-connected resonators;
• wherein at least a pair of said plurality of serially-connected resonators are oriented within the sealed cavity so that their respective net acceleration vectors are in antiparallel relative to each other;
• and wherein said programmable NIC is a CMOS-based NIC within the integrated circuit substrate.

An integrated circuit device, comprising:

• a monolithic multi-resonator device comprising a rectangular-shaped quartz blank having first and second pairs of electrodes thereon that define two quartz resonators, which are mechanically coupled in anti-parallel and have respective input and output terminals at opposing ends of the rectangular-shaped quartz blank, said first pair of electrodes including a first top electrode and underlying first bottom electrode and said second pair of electrodes including a second top electrode, which is patterned as a 180°-rotated version of the first top electrode, and an underlying second bottom electrode, which is patterned as a 180°-rotated version of the first bottom electrode;
• an at least two-piece package having a sealed cavity therein containing said monolithic multi-resonator device;
• and wherein the two quartz resonators are electrically connected in series within the at least two-piece package;
• and
• an integrated circuit substrate having a programmable negative impedance converter (NIC) therein, which is configured to mimic a negative capacitive reactance, said programmable NIC having first and second terminals electrically connected to corresponding input and output terminals of one of the two quartz resonators within the at least two-piece package.