Semiconductor laser device
AssigneeKabushiki Kaisha Toshiba
InventorsNobuo Suzuki, Masaki Tohyama
Life of this patent
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Abstract
A semiconductor laser device in an embodiment includes a compound semiconductor layer and a silicon layer. The compound semiconductor layer includes an active layer emitting laser light and has a first mesa structure. The silicon layer is bonded with the compound semiconductor layer. A diffraction grating is provided on a surface of the silicon layer which faces the compound semiconductor layer, and includes a main diffraction grating and two sub-diffraction gratings. The main diffraction grating extends in a longitudinal direction of the first mesa structure; the sub-diffraction gratings are disposed on both sides of the main diffraction grating.
Claims12
A semiconductor laser device comprising:
- a compound semiconductor layer including an active layer emitting laser light, the compound semiconductor layer having a first mesa structure;
- and
- a silicon layer bonded with the compound semiconductor layer, a diffraction grating being provided on a surface of the silicon layer facing the compound semiconductor layer, the diffraction grating including a main diffraction grating and two sub-diffraction gratings, the main diffraction grating extending in a longitudinal direction of the first mesa structure, the sub-diffraction gratings being disposed on both sides of the main diffraction grating,
- wherein
- each of the main diffraction grating and the two sub-diffraction gratings is entirely disposed directly under the first mesa structure
- the main diffraction grating is disposed at a region containing a node of a first higher-order transverse mode of the laser light,
- each of the sub-diffraction gratings is disposed at a region containing a node of a second higher-order transverse mode of the laser light,
- and
- each of the sub-diffraction gratings is disposed with its period and phase substantially equal to those of the main diffraction grating.
Dependencies are inferred from the claim text.