Method of manufacturing anode active material with oxide coating on active particles

A method of manufacturing an anode, the anode being used in a battery including a cathode, an anode and an electrolyte, the method comprising:

• providing an anode active material layer including anode active material particles on an anode current collector, the anode active material particles including silicon (Si), tin (Sn), or both;
• and
• forming, in a region of a surface of each of the anode active material particles destined to be in contact with the electrolyte, an oxide-containing film including (a) an oxide of at least one selected from the group consisting of silicon, germanium (Ge), and tin and (b) a fluorine ion, a tetrafluoroborate ion, a hexafluorophosphate ion, or a sulfate ion, by applying the oxide-containing film in a liquid phase to the anode active material particles,
• wherein,
• the oxide-containing film is formed by a sol-gel method using (a) a fluorine anion or a compound including fluorine and (b) a Group 13 to 15 element as a sol-gel reaction accelerator.