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US 9,431,606 B1Granted
Memory cells
AssigneeMicron Technology, Inc.
InventorsDurai Vishak Nirmal Ramaswamy, Dale W. Collins, Christopher W. Petz, Beth R. Cook
Life of this patent
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Abstract
Some embodiments include a memory cell having a pair of electrodes, and a plurality of switching levels between the electrodes. Each switching level has an ion buffer region and a dielectric region. At least one switching level differs from another switching level in one or both of thickness and composition of the ion buffer region and/or the dielectric region.
Claims6
A memory cell, comprising:
- a pair of electrodes, the electrodes being a first electrode and a second electrode, the first electrode being over the second electrode;
- first and second switching regions between the electrodes;
- the first switching region being over the second switching region;
- the first switching region comprising a first ion buffer layer and a first dielectric layer;
- the second switching region comprising a second ion buffer layer and a second dielectric layer;
- wherein the first and second ion buffer layers comprise CuZrAlTeO, where the chemical formula lists primary constituents rather than designating a specific stoichiometry;
- an ion source region between the first switching region and the first electrode;
- the second switching region being spaced from the ion source region by the first switching region;
- wherein the first dielectric layer is thicker than the second dielectric layer;
- wherein the first and second ion buffer layers comprise first and second concentrations of tellurium, respectively;
- and wherein the second concentration of tellurium is higher than the first concentration of tellurium;
- and
- wherein the first and second ion buffer layers comprise first and second concentrations of aluminum, respectively;
- and wherein the second concentration of aluminum is lower than the first concentration of aluminum.
11 more elements
A memory cell, comprising:
- a second electrode spaced from a first electrode;
- an ion source region proximate the first electrode;
- a stack of alternating ion buffer layers and dielectric layers between the ion source region and the second electrode;
- the stack comprising switching regions with each switching region corresponding to one of the ion buffer regions layers paired with an adjacent one of the dielectric layers;
- wherein a first of the ion buffer layers is closer to the ion source region than a second of the ion buffer layers;
- wherein the first ion buffer layer is thicker than the second ion buffer layer;
- wherein the first and second ion buffer layers comprise CuZrAlTeO, where the chemical formula lists primary constituents rather than designating a specific stoichiometry;
- wherein the first ion buffer layer has a first tellurium concentration and a first aluminum concentration;
- wherein the second ion buffer layer has a second aluminum concentration and a second tellurium concentration;
- and
- wherein the second tellurium concentration is higher than the first tellurium concentration, and the second aluminum concentration is lower than the first aluminum concentration.
8 more elements
A memory cell, comprising:
- a second electrode spaced from a first electrode;
- an ion source region proximate the first electrode;
- a stack of alternating ion buffer layers and dielectric layers between the ion source region and the second electrode;
- the stack comprising switching regions corresponding to ion buffer layers paired with adjacent dielectric layers;
- wherein a first of the dielectric layers is closer to the ion source region than a second of the dielectric layers;
- wherein the first and second dielectric layers comprise AlO, where the chemical formula lists primary constituents rather than designating a specific stoichiometry;
- and
- wherein:
- a first of the switching regions comprises a first of the ion buffer layers paired with the first dielectric layer, and a second of the switching regions comprises a second of the ion buffer layers paired with the second dielectric layer, the first ion buffer layer being between the second ion buffer layer and the ion source region;
- the first ion buffer layer is thicker than the second ion buffer layer;
- the first and second ion buffer layers comprise CuZrAlTeO, where the chemical formula lists primary constituents rather than designating a specific stoichiometry;
- the first ion buffer layer has a first tellurium concentration and a first aluminum concentration;
- the second ion buffer layer has a second tellurium concentration and a second aluminum concentration;
- and
- the second tellurium concentration is higher than the first tellurium concentration, and the second aluminum concentration is lower than the first aluminum concentration.
12 more elements
Dependencies are inferred from the claim text.