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US 9,431,580 B2Granted
Method for producing an optoelectronic component, and an optoelectronic component
AssigneeOSRAM Opto Semiconductors GmbH
InventorsVolker Härle, Christine Höss, Alfred Lell, Uwe Strauss
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Abstract
A method for producing an optoelectronic component comprising the steps of providing a semiconductor layer sequence having at least one active region, wherein the active region is suitable for emitting electromagnetic radiation during operation, and applying at least one layer on a first surface of the semiconductor layer sequence by means of an ion assisted application method.
Claims10
A method for producing an optoelectronic component, comprising:
- providing a semiconductor layer sequence having at least one active region, wherein the at least one active region emits electromagnetic radiation during operation;
- and
- applying, with an ion assisted application method, at least one layer directly on a first surface of the semiconductor layer sequence such that the at least one layer has a peak-to-peak roughness of less than approximately 4 nm,
- applying, with an ion assisted application method, at least one layer directly on a second surface of the semiconductor layer sequence such that the at least one layer has a peak-to-peak roughness of less than approximately 4 nm, the second surface arranged on a side of the semiconductor layer sequence that is remote from the first surface,
- wherein material applied by the ion assisted application method is one of:
- ionized and accelerated in an electric field towards the semiconductor layer sequence, and
- accelerated by at least one of an ionized gas and an ionized gas beam,
- wherein the second surface comprises a radiation exit area,
- wherein the applying the at least one layer on the first surface consists of applying a plurality of layer pairs, each of said layer pairs consisting of a first layer and a second layer,
- wherein the applying the at least one layer on the second surface consists of applying a plurality of layer pairs, each of said layer pairs consisting of a first layer and a second layer,
- wherein each first layer consists of tantalum pentoxide,
- wherein each second layer comprises silicon dioxide,
- wherein each of the first and second layers has a thickness of approximately a quarter of the wavelength of the electromagnetic radiation emitted by the active region of the semiconductor layer sequence, and
- wherein a number of layer pairs on the second surface is less than a number of layer pairs on the first surface.
11 more elements
Dependencies are inferred from the claim text.