Three dimensional compositional profile in CIS-based absorber layers of thin film solar cells
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorChien Yao Huang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorChien Yao Huang
Estimating the term…
Provided is a structure and method for forming CIS-based absorber layers for thin-film solar cells that include three-dimensional compositional profiles. The disclosure provides a patterned absorber layer with two or more different regions, each of the regions having a different concentration profile of one or more components. In some embodiments, the different regions have different respective GGI profiles. GGI represents an atomic ratio of Ga/(Ga+In) in CIS-based absorber materials and in some embodiments the two or more different regions have GGI gradients from top to bottom of the CIS-based absorber layer. The method includes using two evaporation sources in a co-evaporation system to produce the two or more different regions adjacent one another on a substrate.
A solar cell comprising:
A solar cell comprising:
Dependencies are inferred from the claim text.