Back to results
US 9,431,556 B2Granted
Long wavelength infrared sensor materials and method of synthesis thereof
AssigneeUniversity of Houston System
InventorsAlexandre Freundlich, Lekhnath Bhusal
Life of this patent
Estimating the term…
Abstract
A dilute nitrogen alloy of InNxSb1-x epilayers strained to an epitaxial substrate useful for Long Wavelength Infrared (LWIR) Focal Plane Arrays, and method of fabricating. Strained materials of composition InNxSb1-x exhibiting increased Auger lifetimes and improved absorption properties.
Claims3
A long wavelength infrared sensor material comprising:
- a dilute nitrogen alloy of InNxSb1-x epilayers strained to an InSb epitaxial substrate;
- wherein the infrared sensor material was fabricated using a substrate temperature in a range of about 400° C. to 420° C., a nitrogen plasma source power in a range of about 250-350 W, and a ratio of In flux to Sb flux in the range of about 1 to 2;
- wherein the nitrogen composition in the alloy is in a range of about 0.2% to 1.5%;
- wherein the infrared sensor material exhibits reduced surface roughness and improved crystalline quality compared with a comparative sensor material fabricated at a same nitrogen plasma source power in a range of about 250-350 W and a same ratio of In flux to Sb flux in a range of about 1 to 2 and at a lower temperature below 400° C.;
- wherein the infrared sensor material has a cut-off wavelength in a range of 8-14 μm;
- and
- wherein an X-ray diffraction (XRD) of the infrared sensor material shows a peak with full-width at half maximum (FWHM) of about 40 arcsec.
4 more elements
Dependencies are inferred from the claim text.