Dummy gate structure and methods thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChia-Chu Liu, Kuei-Shun Chen, Chiang Mu-Chi, Chao-Cheng Chen
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChia-Chu Liu, Kuei-Shun Chen, Chiang Mu-Chi, Chao-Cheng Chen
Estimating the term…
A structure and method for implementation of dummy gate structures within multi-gate device structures includes a semiconductor device including an isolation region that separates a first and second active region. The first active region is adjacent to a first side of the isolation region and the second active region is adjacent to a second side of the isolation region. A device including a source, a drain, and a gate is formed within the first active region. One of the source and drain regions are disposed adjacent to the isolation region. A dummy gate is formed at least partially over the isolation region and adjacent to the one of the source and drain regions. In various examples, the gate includes a first dielectric layer having a first thickness and the dummy gate includes a second dielectric layer having a second thickness greater than the first thickness.
A semiconductor device, comprising:
A semiconductor structure, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.