Dual work function buried gate-type transistor, method for forming the same, and electronic device including the same
AssigneeSK hynix Inc.
InventorDong-Kyun Kang
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AssigneeSK hynix Inc.
InventorDong-Kyun Kang
Estimating the term…
A transistor includes: a source region and a drain region that are formed in a substrate to be spaced apart from each other; a trench formed in the substrate between the source region and the drain region; and a buried gate electrode inside the trench, wherein the buried gate electrode includes: a lower buried portion which includes a high work-function barrier layer including an aluminum-containing titanium nitride, and a first low-resistivity layer disposed over the high work-function barrier layer; and an upper buried portion which includes a low work-function barrier layer disposed over the lower buried portion and overlapping with the source region and the drain region, and a second low-resistivity layer disposed over the low work-function barrier layer.
A transistor comprising:
A transistor comprising:
Dependencies are inferred from the claim text.