Array-type light-receiving device

An array-type tight-receiving device comprising:

• a substrate including a main surface, a rear surface, and a plurality of recesses formed in the rear surface, the rear surface including an incident plane on which incident light is received;
• a stacked semiconductor layer disposed on the main surface of the substrate, the stacked semiconductor layer including a light-receiving layer;
• and
• a plurality of pixel regions each of which includes the light-receiving layer and corresponds to one of the recesses, wherein
• the recesses are each depressed from the rear surface in a thickness direction of the substrate,
• each of the recesses has a bottom surface and a side surface, the bottom surface facing at least its corresponding pixel region, the side surface including a tapered region inclined at a predetermined inclination angle with respect to an in-plane direction of the main surface,
• each of the pixel regions includes a light-receiving plane in the light-receiving layer, the light-receiving plane of each pixel region extending along the main surface of the substrate,
• the bottom surface of each recess faces the light-receiving plane of its corresponding pixel region, and
• the inclination angle satisfies the relational expression:
• 90°≧θ≧45° and (L2−L1)/(2×L3)≧tan(2θ)≧−(L1+L2)/(2×L3), where θ represents the inclination angle, L1 represents a pitch at which the recesses are arranged, L2 represents a diameter of the light-receiving lane of each pixel region, and L3 represents a distance from the rear surface to the light-receiving plane of each pixel region.