Semiconductor device and method for manufacturing the same
AssigneePS4 Luxco S.a.r.l.
InventorKenji Komeda
Life of this patent
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Abstract
A semiconductor device provided with a capacitor that includes a plurality of cylindrical or columnar storage electrodes provided periodically on a semiconductor substrate, capacitor insulation films that cover the wall surfaces of the storage electrodes, and first conductive films provided on the capacitor insulation film and facing the storage electrodes, wherein the first conductive films of the capacitors adjacent in a first direction in which the storage electrodes are arranged are in contact with each other, and the first conductive films of capacitors adjacent in remaining other directions in which the storage electrodes are arranged are separated from each other.
Claims21
A semiconductor device comprising:
- capacitors which contain a plurality of crown-type or column-type storage electrodes provided upright in a periodic manner on a semiconductor substrate;
- capacitative insulating films covering wall surfaces of the storage electrodes;
- and
- first conductive films on the capacitative insulating films, on the opposite side to the storage electrodes, wherein
- in plan view, a first column of the storage electrodes is adjacent to a second column of the storage electrodes,
- the first conductive films of the storage electrodes of the first column contact each other, and
- the first conductive films of the storage electrodes of the second column are separated from the first conductive films of the storage electrodes of the first column.
Dependencies are inferred from the claim text.