Semiconductor structure and method for forming the same
AssigneeSemiconductor Manufacturing International (Shanghai) Corporation
InventorXianjie Ning
Life of this patent
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AssigneeSemiconductor Manufacturing International (Shanghai) Corporation
InventorXianjie Ning
Estimating the term…
Various embodiments provide semiconductor structures and methods for forming the same. In an exemplary structure, a substrate has a device region, a seal ring region surrounding the device region, and a dielectric layer disposed thereon. A first seal ring structure is located within the dielectric layer on the seal ring region, and includes a plurality of first connection layers overlappingly disposed and separated by the dielectric layer. At least one first connection layer is formed by a plurality of discrete sub-connection layers. The first seal ring structure further includes a plurality of first conductive plugs between vertically adjacent first connection layers. A top of each first conductive plug is connected to an upper first connection layer. A bottom of each first conductive plug between at least two vertically adjacent first connection layers extends into the dielectric layer between horizontally adjacent sub-connection layers of a lower first connection layer.
A semiconductor structure, comprising:
Dependencies are inferred from the claim text.