Rule clean layer marker
AssigneeGlobalfoundries Inc.
InventorsPeter Benjamin Volk, Michael Ronald Otto, Christoph Rainer Gerhard Mueller
Life of this patent
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Abstract
A method and apparatus for including human readable text in a semiconductor design which is both machine readable for printing on a wafer and human readable from the wafer are disclosed that are design rule clean depending on the layer to be printed. Embodiments include receiving a semiconductor design including a layer marker, the layer marker including human readable text; transforming the human readable text to a binary representation; transforming the binary representation to a machine readable two-dimensional barcode; and printing the two-dimensional barcode on a semiconductor wafer.
Claims20
A method comprising:
- receiving a semiconductor design including a layer marker, the layer marker including human readable text;
- transforming, in a text-to-binary converter, the human readable text to a binary representation;
- transforming, in a binary-to-barcode converter, the binary representation to a machine readable two-dimensional barcode;
- and
- printing the two-dimensional barcode on a semiconductor wafer.
A method comprising:
- placing under a microscope a semiconductor wafer including a layer marker, the layer marker comprising a machine readable two-dimensional barcode, the barcode representing a human readable text;
- viewing the semiconductor wafer through a decoding apparatus in the microscope, wherein the decoding apparatus transforms the two-dimensional barcode into human readable text;
- and
- reading the two-dimensional barcode as the human readable text.
An apparatus comprising:
- a light source;
- a wafer holder;
- a magnification lens;
- a decoding device, wherein the decoding device transforms a machine readable two-dimensional barcode representation of a human readable text to the human readable text.
Dependencies are inferred from the claim text.