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US 9,431,315 B2Granted
Chemical sensor package for highly pressured environment
AssigneeAgency for Science, Technology and Research
InventorsDaniel Rhee Min Woo, How Yuan Hwang, Vivek Chidambaram, Yuen Sing Chan, Eva Leong Ching Wai, Jong Bum Lee
Life of this patent
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Abstract
A package for a chemical sensor including an encapsulation and a pressure balancing structure is disclosed. The encapsulation encapsulates a chemical sensor and has a hole for exposing a chemical sensitive part of the chemical sensor. The pressure balancing structure balances pressure applied to the chemical sensor at the chemical sensitive part.
Claims8
A chemical sensor package for highly pressured environment comprising:
- an encapsulation for encapsulating a chemical sensor, having a hole for exposing a chemical sensitive part of the chemical sensor for sensing purpose;
- a pressure balancing structure for balancing pressure applied to the chemical sensor at the chemical sensitive part, wherein the pressure balancing structure is a pressure balancing hole for applying counter pressure to the chemical sensor at the opposite side of the chemical sensitive part;
- and
- a Redistribution Layer (RDL) on the chemical sensor for moving a wiring outside of the encapsulation away from the opposite side of the chemical sensitive part.
1 more element
A pressure resistant chemical sensor comprising:
- a chemical sensor;
- an encapsulation for encapsulating the chemical sensor, having a hole for exposing a chemical sensitive part of the chemical sensor for sensing purpose;
- a pressure balancing structure for balancing pressure applied to the chemical sensor at the chemical sensitive part, wherein the pressure balancing structure is a pressure balancing hole for applying counter pressure to the chemical sensor at the opposite side of the chemical sensitive part;
- and
- a Redistribution Layer (RDL) on the chemical sensor for moving a wiring outside of the encapsulation away from the opposite side of the chemical sensitive part.
2 more elements
Dependencies are inferred from the claim text.