Back to results
US 9,431,282 B2Granted
Wafer inversion mechanism
AssigneeRudolph Technologies, Inc.
InventorTroy Palm
Life of this patent
Estimating the term…
Abstract
A BOLTS compatible module includes a support mechanism for gripping a wafer. The support mechanism is coupled to a rotary mechanism for rotating the support mechanism with a wafer grip therein. The rotary mechanism is coupled to the module and capable of at least 180° of rotation.
Claims17
A BOLTS compatible module comprising:
- a BOLTS compatible housing;
- and
- a support mechanism including opposing, first and second clamp arms within the housing, the support mechanism to grip a wafer, the support mechanism being coupled to a rotary mechanism including a rotary bearing to rotate the support mechanism with a wafer gripped therein, the rotary mechanism being coupled to the module and capable of at least 180° of rotation to invert a wafer gripped by the support mechanism.
An edge grip mechanism comprising:
- opposing, spaced apart, first and second arm bodies;
- and
- at least two gripping members carried by the arm bodies, each gripping member having a first portion carried by the first arm body and a second portion carried by the second arm body, wherein the first portion is movable in a linear path relative to the first arm body and the second portion is moveable in a linear path relative to the second arm body, the portions reciprocating in a plane parallel to the arm bodies between an open position in which a substrate may be placed or removed and a closed position in which the first portion overlaps the corresponding second portion and the substrate is positively grasped;
- each gripping member having a pair of contact faces that work in conjunction with one another to grasp the substrate.
1 more element
A method of handling a substrate, comprising:
- positioning the substrate between two gripping members, each gripping member having a first portion and a second portion, the first portion moveably supported by a first arm body and the second portion moveably supported by second arm body, the first and second arm bodies arranged in an opposing, spaced apart fashion relative to one another;
- reciprocating the first portion and the second portion of each of the two gripping members in a linear path and in a plane parallel with the arm bodies from an open position in which the substrate was positioned to a closed position in which the first portion and the second portion of each of the two gripping members overlap to positively grasp the substrate;
- and
- rotating the substrate 180°.
1 more element
Dependencies are inferred from the claim text.