Sputter neutral particle mass spectrometry apparatus with optical element

A sputter neutral particle mass spectrometry apparatus comprising:

• a sample table holding a sample which is a mass spectrometry target;
• an ion beam irradiation device which irradiates an ion beam on the sample held by the sample table to generate neutral particles in an adjacent region of the sample;
• a light beam irradiation device which irradiates a light beam on the neutral particles positioned in the adjacent region to obtain photoexcited ions;
• a draw-out electrode which draws out the photoexcited ions;
• a mass spectrometer which draws in the drawn out photoexcited ions to perform mass analysis;
• and
• an optical element which is provided in a light path after the light beam passes the adjacent region, and changes a traveling direction of the light beam so that the light beam passes the adjacent region again,
• wherein the optical element is a concave mirror, and
• wherein the concave mirror is placed on a surface of the sample, and a height from the sample surface to top of the concave mirror is set lower than a position in the adjacent region where a group of the neutral particles becomes widest in a direction parallel to the surface of the sample.