Hybrid electron microscope

A process for making a hybrid electron microscope, the process comprising:

• disprosing an electron source to emit an electron beam in a chamber;
• disposing a parabolic mirror in the chamber, the parabolic mirror comprising:
• a reflective surface;
• and
• an aperture to communicate the electron beam through the parabolic mirror;
• interposing a sample holder between the electron source and the parabolic mirror such that the reflective surface of the parabolic mirror faces the electron source and the sample holder;
• and
• disposing an armature in the chamber, the armature comprising:
• an optical path to communicate a probe light to the reflective surface and to communicate a collected light from the reflective surface;
• a first end disposed proximate to the sample holder;
• a second end disposed distal to the sample holder and the parabolic mirror, the parabolic mirror disposed on the second end;
• an optical path extending from the first end to the second end to communicate the probe light and the collected light;
• and
• an optical window disposed at the first end of the armature to receive the probe light from a light source and to communicate the collected light from the parabolic mirror to a detector.

A process for acquiring hybrid electron microscopy data, the process comprising:

• disposing a parabolic mirror in a chamber, the parabolic mirror comprising;
• a reflective surface;
• and
• an aperture to communicate the electron beam through the parabolic mirror;
• disposing a sample on a sample holder;
• interposing a sample holder between the electron source and the parabolic mirror such that the reflective surface of the parabolic mirror faces the electron source and the sample holder;
• and
• producing the electron beam from the electron source;
• subjecting the sample to the electron beam;
• communication the electron beam through the sample and the aperture of the parabolic mirror;
• collecting imaging data of the sample in response to the subjecting the sample to the electron beam to acquire the hybrid electron microscopy data;
• communicating a probe light through an armature comprising an optical path to the reflective surface;
• reflecting the probe light from the reflective surface;
• receiving, by the sample, the probe light reflected from the reflective surface;
• emitting light from sample in response to the sample receiving the probe light or being subjected to the electron beam;
• receiving, by the parabolic mirror the light emitted from the sample to produce the collected light;
• and
• communicating the collected light from the parabolic mirror through the optical path of the armature.