Comb structure for a disk drive suspension piezoelectric microactuator operating in the D33 mode, and method of manufacturing the same

A microactuator assembly for a dual stage actuated disk drive suspension, the assembly comprising:

• a first metal plate defining a first electrode, the first metal plate having a first plurality of fingers extending therefrom;
• a second metal plate defining a second electrode, the second metal plate having a second plurality of fingers extending therefrom, the second plurality of fingers interlaced with the first plurality of fingers and defining respective electrode gaps between adjacent ones of the fingers, and with successive ones of the interlaced fingers proceeding in a first direction;
• and
• a plurality of piezoelectric elements disposed between respective ones of the fingers thereby spanning respective ones of the electrode gaps, the plurality of piezoelectric elements arranged such that successive ones of the piezoelectric elements proceed generally in the first direction and are not vertically stacked relative to one another;
• wherein:
• the piezoelectric elements are poled such that when a voltage differential is applied across the first and second electrodes, the piezoelectric elements all expand in their d33 mode along a line that extends through individual ones of the piezoelectric elements;
• and
• the first and second electrodes have z-dimension features formed therein, the piezoelectric elements extending into the z-dimension features thereby anchoring the piezoelectric elements to the electrodes.

A microactuator assembly for a dual stage actuated disk drive suspension, the assembly comprising:

• a first electrode integrally formed of a first unitary piece of metal, the first electrode comprising:
• a first plurality of elongate conductive components electrically connected together for application of a first electric potential thereto, the first plurality of elongate conductive components defining first electrode fingers;
• a first connector electrically connecting the first electrode fingers;
• and
• a generally flat first extension portion;
• a second electrode integrally formed of a second unitary piece of metal, the second electrode comprising:
• a second plurality of elongate conductive components electrically connected together for application of a second electric potential thereto, the second plurality of elongate conductive components defining second electrode fingers;
• a second connector electrically connecting the second electrode fingers;
• and
• a generally flat second extension portion;
• the first and second electrode fingers being arranged to define a plurality of respective electrode gaps therebetween;
• and
• at least one piezoelectric element spanning the electrode gaps, the at least one piezoelectric element being poled such that when an electric potential is applied across the first and second electrodes thereby creating respective electric fields across the electrode gaps, the at least one piezoelectric element expands or contracts in response to said electric fields such that the electrode gaps widen or narrow;
• wherein:
• the at least one piezoelectric element and the electrode gaps are arranged serially such that expansion of the gaps causes an expansion of the microactuator in a direction that is generally the same as a line drawn through the piezoelectric elements;
• and
• the first and second electrode extension portions extend past the at least one piezoelectric element and are not covered thereby, and are suitable for welding to a suspension component.

A microactuator assembly for a dual stage actuated disk drive suspension the assembly comprising:

• a first electrode comprising a first plurality of elongate conductive components electrically connected together for application of a first electric potential thereto, the first plurality of elongate conductive components defining first electrode fingers;
• a second electrode comprising a second plurality of elongate conductive components electrically connected together for application of a second electric potential thereto, the second plurality of elongate conductive components defining second electrode fingers;
• the first and second electrode fingers being arranged to define a plurality of respective electrode gaps therebetween;
• and
• a plurality of isolated islands of piezoelectric material, each island spanning an associated one of the electrode gaps, each island defining a piezoelectric element, the piezoelectric elements being poled such that when an electric potential is applied across the first and second electrodes thereby creatin respective electric fields across the electrode gaps, the piezoelectric elements expand or contract in response to said electric fields such that the electrode gaps widen or narrow;
• wherein the piezoelectric elements and the electrode gaps are arranged serially such that expansion of the gaps causes an expansion of the microactuator in a direction that is generally the same as a line drawn through the piezoelectric elements.

A microactuator assembly for a dual stage actuated disk drive suspension the assembly comprising:

• a first electrode comprising a first plurality of elongate conductive components electrically connected together for application of a first electric potential thereto, the first plurality of elongate conductive components defining first electrode fingers;
• a second electrode comprising a second plurality of elongate conductive components electrically connected together for application of a second electric potential thereto, the second plurality of elongate conductive components defining second electrode fingers;
• the first and second electrode fingers being arranged to define a plurality of respective electrode gaps therebetween;
• and
• at least one piezoelectric element spanning the electrode gaps, the at least piezoelectric element being poled such that when an electric potential is applied across the first and second electrodes thereby creating respective electric fields across the electrode gaps, the at least one piezoelectric ent ex ands or contracts in response to said electric fields such that the electrode gaps widen or narrow;
• wherein:
• the at least one piezoelectric element and the electrode gaps are arranged serially such that expansion of the gaps causes an expansion of the microactuator in a direction that is generally the same as a line drawn through the piezoelectric elements;
• the first and second electrode fingers have z-dimension features formed therein, and the at least one piezoelectric element extends into the z-dimension features whereby the at least one piezoelectric element is anchored to the electrode fingers;
• and
• the z-dimension features of some of the electrode fingers are asymmetric with respect to other ones of the electrode fingers, causing the two electrodes to experience a component of relative rotational movement when said electric potential is applied across the electrodes.