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US 9,429,587 B2Granted
Sensor with laser welded cover
AssigneeASM Automation Sensorik Messtechnik GmbH
InventorKlaus Manfred Steinich
Life of this patent
Estimating the term…
Abstract
In order to configure a housing of a sensor, in particular of an angle sensor, long term leak tight in the best way possible a cover is not glued into the pot shaped housing or screwed in and sealed, but welded in the housing through a laser. In spite of the sensor chip already being in the housing, the heat induction is so small that the sensor chip is not damaged even though the sensor chip is very small.
Claims13
A MEM sensor, in particular an angle sensor or inclination sensor/turn-rate sensor, comprising:
- a pot shaped housing (2) with a free space in the interior of the pot shaped housing forming a dead hole, the dead hole having a first shoulder (6) and a lower lying second circumferential shoulder (6′) offset in axial direction from the first shoulder (6), both protruding inward and both configured in the interior of the dead hole;
- a cover (3) closing the housing (2);
- and
- a magnetic field sensitive sensor element (4) inside the housing,
- wherein the cover (3) in the form of a circular disc is welded from a face side of the housing to the housing (2) through laser light, said cover having a thickness (5);
- wherein the cover (3) is inserted into the face of the pot shaped housing (2) and into the first shoulder (6), as a contact surface so that the cover (3) and the housing (2) are flush with one another on a frontal outside, wherein the first shoulder (6) protrudes radially inward at least by an amount of the thickness (5) of the cover (3);
- wherein the cover is a flat and plane parallel plate with an entire region of the cover having a constant thickness;
- at the second shoulder in the interior circumference, an intermediary pot made of plastic is applied which faces the base of the hole of the housing with its base and whose circumferential wall protrudes approximately below the disc shaped cover inserted into the first shoulder;
- and
- wherein a circuit board, on which the sensor element is arranged, contacts a shoulder in the intermediary pot.
7 more elements
A MEM sensor, in particular an angle sensor or inclination sensor/turn-rate sensor, comprising:
- a pot shaped housing (2) with a free space in the interior of the pot shaped housing forming a dead hole, the dead hole having a first shoulder (6) and a lower lying second circumferential shoulder (6′) offset in axial direction from the first shoulder (6), both protruding inward and both configured in the interior of the dead hole;
- a cover (3) closing the housing (2);
- and
- a magnetic field sensitive sensor element (4) inside the housing,
- wherein the cover (3) in the form of a circular disc is welded from a face side of the housing to the housing (2) through laser light, said cover having a thickness (5);
- wherein the cover (3) is inserted into the face of the pot shaped housing (2) and into the first shoulder (6), as a contact surface so that the cover (3) and the housing (2) are flush with one another on a frontal outside, wherein the first shoulder (6) protrudes radially inward at least by the amount of the thickness (5) of the cover (3);
- at the lower lying second shoulder in the interior circumference, an intermediary pot made of plastic is applied which faces the base of the hole of the housing with its base and whose circumferential wall protrudes approximately below the disc shaped cover inserted into the first shoulder;
- and
- wherein a circuit board, on which the sensor element is arranged, contacts a shoulder in the intermediary pot,
- wherein the cover is a flat and plane parallel plate with an entire region of the cover having a constant thickness, and
- wherein the pot shaped housing comprises a free space.
8 more elements
Dependencies are inferred from the claim text.