Loading patent…
AssigneesShimadzu Corporation, Tohoku University
InventorsHideki Tominaga, Ryuta Hirose, Kenji Takubo, Shigetoshi Sugawa, Rihito Kuroda
Estimating the term…
A plurality of photodiodes arrayed in a one-dimensional form are divided into a plurality of groups. The structure of an antireflection coating is changed for each group so that all the surfaces of the photodiodes belonging to each group are covered with an antireflection coating having a transmittance characteristic which shows a maximum transmittance within a range of wavelengths of light to be received by those photodiodes. In particular, a SiO2 coating layer on the silicon substrate and an Al2O3 coating layer are common to all the photodiodes, while the structure of the upper layers are modified with respect to the wavelength. Within an ultraviolet wavelength region, the coating structure is more finely changed with respect to the wavelength. By such a design, the transmittance can be improved while making the best efforts to avoid a complex manufacturing process.
A photodiode array for spectrometric measurements having a plurality of photodiodes arrayed in a one-dimensional form, the photodiode array being arranged so that an array direction of the photodiodes is made to coincide with a wavelength-dispersing direction of a light-dispersing element so as to concurrently detect wavelength components of light dispersed by the light-dispersing element, wherein:
Dependencies are inferred from the claim text.