Environmentally robust micro-wineglass gyroscope

An environmentally robust micro-wineglass gyroscope comprising:

• an inner glass layer forming a mushroom-shaped structure having a free perimeter;
• at least one shell electrode disposed on the mushroom-shaped structure;
• an outer glass layer forming a shield extending over the inner glass layer having a periphery while leaving the inner and outer glass layers connected together at a central post location;
• and
• a handle wafer bonded only to the central post location of the mushroom-shaped structure formed by the inner glass layer and bonded to the periphery of the shield formed by the outer glass layer, the handle wafer having at least one wafer electrode for electrostatic coupling with the at least one shell electrode,
• whereby a double ended supported central post location is created fort the mushroom-shaped structure of the inner glass layer to provide an environmentally robust gyroscope.

A micro-wineglass gyroscope comprising:

• an inner glass layer forming a mushroom-shaped structure having a free perimeter;
• at least one inner shell electrode disposed on the mushroom-shaped structure;
• an outer glass layer forming a shield extending over the inner glass layer having a free periphery while leaving the inner and outer glass layers connected together at a central post location;
• at least one outer shell electrode disposed on the mushroom-shaped structure;
• and
• a handle wafer bonded only to the central post location of the mushroom-shaped structure formed by the inner glass layer, the handle wafer having at least one wafer electrode for electrostatic coupling with the at least one inner and/or outer shell electrodes.