Process chamber gas flow apparatus, systems, and methods
AssigneeApplied Materials, Inc.
InventorsNir Merry, Chandrakant M. Sapkale, Karuppasamy Muthukamtchi, Jeffrey C. Hudgens, Penchala N. Kankanala
Life of this patent
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Abstract
Process chamber gas flow control apparatus having a tiltable valve are disclosed. The gas flow apparatus includes a process chamber adapted to contain a substrate, an exit from the process chamber including a valve seat, and a tiltable valve configured and adapted to tilt relative to the valve seat to control flow non-uniformities within the process chamber. Systems and methods including the tiltable valve apparatus are disclosed, as are numerous other aspects.
Claims20
A method of controlling flow of a process gas within a process chamber, comprising:
- providing a process chamber adapted to contain a substrate;
- providing a side opening adapted to allow the substrate to be provided to and withdrawn from the process chamber;
- providing a process gas inlet to the process chamber;
- providing a process gas exit including a valve seat and a tiltable valve;
- and
- adjusting a flow pattern in the process chamber by tilting the tiltable valve relative to the valve seat.
A process chamber gas flow control apparatus, comprising:
- a process chamber adapted to contain a substrate;
- a side opening adapted to allow the substrate to be provided to and withdrawn form the process chamber;
- a process gas inlet to the process chamber;
- a process gas exit from the process chamber including a valve seat;
- and
- a tiltable valve configured and adapted to tilt relative to the valve seat to control a gas flow pattern within the process chamber.
An electronic device processing system, comprising:
- a process chamber adapted to contain a substrate;
- a side opening adapted to allow the substrate to be provided to and withdrawn from the process chamber;
- a process gas inlet to the process chamber;
- and
- a process gas exit from the process chamber including a valve seat and a tiltable valve, the tiltable valve being configured and adapted to tilt relative to the valve seat to adjust a gas flow pattern within the process chamber.
Dependencies are inferred from the claim text.