Ceramic barrier layers
AssigneeOSRAM OLED GmbH
InventorsKarsten Heuser, Georg Wittmann, Guenter Gieres, Ralph Paetzold, Debora Henseler
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Abstract
Forming an arrangement of two ceramic barrier layers (5, 10) on a polymeric substrate (1) includes the steps of applying a first ceramic barrier layer (5) on the substrate (1). The surface (5A) of the first barrier layer (5) is modified to introduce new nucleation sites on the surface of the first layer. A second ceramic barrier layer (10) is formed on the first barrier layer (5) using the new nucleation sites. The second ceramic barrier layer is deposited with independent nucleation sites such that a barrier stack of enhanced quality is formed.
Claims32
A method for forming an arrangement of two barrier layers on a substrate, comprising:
- forming a first ceramic barrier layer on the substrate, wherein the first ceramic barrier layer has a first surface and a second surface and the first surface is closer to the substrate than the second surface;
- modifying at least a portion of the second surface of the first ceramic barrier layer such that the second surface of the first ceramic barrier layer comprises a material different from the material of the first ceramic barrier layer below the second surface to introduce first nucleation sites on the second surface, including depositing a nucleation-promoting material onto the second surface, the first nucleation sites including the nucleation-promoting material;
- and
- forming a second ceramic barrier layer directly on the second surface of the first ceramic barrier layer without continuing all defects of the first ceramic barrier layer, wherein the second ceramic barrier layer is initiated at the first nucleation sites;
- wherein the first ceramic barrier layer and the second ceramic barrier layer together have enhanced barrier capabilities against gas and liquid as compared to two similar adjacent ceramic barrier layers formed without the modifying step to introduce nucleation sites.
Dependencies are inferred from the claim text.