Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsShiro Yazaki, Shunsuke Watanabe
Life of this patent
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Abstract
A piezoelectric element includes a first electrode layer which is stacked on the vibrating plate; a second electrode layer which is stacked on a side opposite to the vibrating plate with respect to the first electrode layer; a piezoelectric layer which is interposed between the first electrode layer and the second electrode layer; and a conductive layer which electrically connects the first electrode layer to external wiring, in which a point of contact between the conductive layer and the first electrode layer is in a vibrating region of the vibrating plate.
Claims7
A piezoelectric element comprising:
- a first electrode layer which is staked on a vibrating plate;
- a second electrode layer which is stacked on a side opposite to the vibrating plate with respect to the first electrode layer;
- a piezoelectric layer which is interposed between the first electrode layer and the second electrode layer;
- and
- a conductive layer which electrically connects the first electrode layer to external wiring,
- wherein a point of contact where the conductive layer and the first electrode layer directly contact each other is in a vibrating region of the vibrating plate, the point of contact being disposed in a conductive hole in an insulating layer that is between the first electrode layer and the conductive layer.
A liquid ejecting head comprising:
- a pressure chamber substrate in which an opening portion which will be a pressure chamber filled with liquid is formed;
- a vibrating plate which seals the opening portion by being stacked on the pressure chamber substrate;
- and
- a piezoelectric element which vibrates the vibrating plate,
- wherein the piezoelectric element includes
- a first electrode layer which is stacked on the vibrating plate,
- a second electrode layer which is stacked on a side opposite to the vibrating plate with respect to the first electrode layer,
- a piezoelectric layer which is interposed between the first electrode layer and the second electrode layer, and
- a conductive layer which electrically connects the first electrode layer to external wiring, and
- wherein a point of contact where the conductive layer and the first electrode layer directly contact each other is in a vibrating region of the vibrating plate, the point of contact being disposed in a conductive hole in an insulating layer that is between the first electrode layer and the conductive layer.
Dependencies are inferred from the claim text.