Method for resuming a wire sawing process of a workpiece after an unplanned interruption
AssigneeSiltronic AG
InventorPeter Wiesner
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AssigneeSiltronic AG
InventorPeter Wiesner
Estimating the term…
A method resumes an interrupted process for sawing a workpiece into wafers using a wire saw that includes advancing a wire web into existing sawing kerfs of the workpiece with a forward movement of the sawing wire with a first speed in the presence of a liquid sawing medium until the wire web or workpiece has reached a position corresponding to the interruption of the wire sawing process. The sawing wire is moved in defined time intervals by a forward movement of a particular length with a second speed and a backward movement of another length with a third speed, where the backward length is less than the forward length and the forward and backward movement correspond to a cycle. The wire length that is unwound during the forward movements is increased until the length during the forward movement corresponds to the length of the forward movement before the interruption.
A method for resuming an interrupted process for sawing a workpiece into a multiplicity of wafers using a wire saw, the wire saw including a sawing wire which spans a wire web including a plurality of wire sections arranged in parallel, the sawing wire being unwound from a feed spool with a forward movement and guided over at least one rotatable deflection pulley into the wire web, leaving the wire web via at least one further rotatable deflection pulley, and being wound onto a take-up spool, the interrupted process, before the interruption, including alternately moving the sawing wire in defined time intervals forward by a first length L1 and backward by a second length L2, the method for resuming the interrupted process comprising:
Dependencies are inferred from the claim text.