Integrated magnetron plasma torch, and related methods
AssigneeAgilent Technologies, Inc.
InventorGuthrie Partridge
Life of this patent
Estimating the term…
Abstract
A plasma source for generating microwave-induced plasma includes a plasma torch integrated with a microwave energy source. The torch establishes a gas flow path from one side of the plasma source to the other side. The torch may be integrated with the microwave energy source such that a plasma-forming gas flowing through the torch is subjected to microwave radiation, which serves to initiate and/or sustain plasma in the torch. The plasma may be ejected from the torch and utilized in various applications involving the use of plasma, including analytical techniques such as optical emission spectrometry and mass spectrometry.
Claims20
A plasma source for generating microwave-induced plasma, comprising:
- a microwave energy source comprising a main structure, the main structure comprising a cathode on a cathode axis, and an anode spaced from the cathode by an interaction space, wherein the main structure further comprises a first side, a second side, and a thickness from the first side to the second side along the cathode axis;
- and
- a plasma torch positioned at the microwave energy source and comprising a torch outlet on the second side, wherein the plasma torch establishes a gas flow path through the plasma torch from the first side to the second side, and the plasma torch is positioned such that a gas flowing along the gas flow path in the plasma torch is irradiated by microwave energy generated by the microwave energy source.
A method for supplying plasma, the method comprising:
- generating microwave energy by operating a microwave energy source that comprises a main structure, the main structure comprising a cathode on a cathode axis, and an anode spaced from the cathode by an interaction space, wherein the main structure further comprises a first side, a second side, and a thickness from the first side to the second side along the cathode axis;
- generating plasma by flowing a plasma-forming gas into a plasma torch from the first side, wherein the plasma-forming gas is irradiated by the microwave energy;
- and
- flowing the plasma from an outlet of the plasma torch on the second side.
Dependencies are inferred from the claim text.