Module, electronic apparatus and moving object
AssigneeSeiko Epson Corporation
InventorTomonaga Kobayashi
Life of this patent
Estimating the term…
Abstract
A module includes an insulating substrate that is a first base material; a cover member having a cavity section and a second recess section that form an internal space between the cover member and the insulating substrate, which is a second base material bonded to the insulating substrate on a first surface thereof; an element piece that is a first functional element, accommodated in the internal space; a recess section formed on a second surface that is a rear surface of the first surface of the cover member; and a semiconductor device that is a second functional element, connected in the recess section.
Claims9
A module comprising:
- a first base that has a first recess in a top surface of the first base;
- a second base that is provided over the first base, the second base having second and third recesses in top and bottom surfaces thereof, respectively;
- a first functional element that is accommodated in an internal space, which is provided by the first and third recesses, at least a part of the first functional element being surrounded by the first base and the second base;
- and
- a second functional element that is mounted in a bottom surface of the second recess, wherein
- the third recess is larger than the first recess in a plan view,
- the first base is larger than the second base in the plan view, and
- the first functional element is a physical quantity sensor having movable and fixed electrodes, and the movable electrodes are completely enclosed by an outer edge of the first recess in the plan view.
Dependencies are inferred from the claim text.