Electro-acoustic transducer
AssigneeSamsung Electronics Co., Ltd.
InventorsSung-chan Kang, Dong-kyun Kim, Sang-ha Park, Jong-seok Kim, Yong-seop Yoon
Life of this patent
Estimating the term…
Abstract
An electro-acoustic transducer includes a plurality of elements, in which each of the plurality of elements includes a plurality of cells, of which at least one of the plurality of cells includes a trench that is formed in a membrane.
Claims20
An electro-acoustic transducer comprising a plurality of elements, wherein each of the plurality of elements comprises a plurality of cells of which at least one of the plurality of cells comprises a trench that is formed in a membrane,
- wherein each of the plurality of cells comprises:
- a substrate;
- a support provided on the substrate and comprising a cavity;
- the membrane configured to cover the cavity;
- and
- an electrode provided on an upper surface of the membrane,
- wherein a height of the trench is less than a height of the membrane.
An element of an electro-acoustic transducer, the element comprising:
- a plurality of cells comprising a first cell and a second cell,
- wherein each of the first cell and the second cell has a same size, and
- wherein a frequency characteristic of the first cell is different from a frequency characteristic of the second cell,
- wherein each of the first cell and the second cell comprises a respective membrane,
- wherein the respective membrane comprises a trench that has a height less than a height of the membrane.
An electro-acoustic transducer comprising a plurality of elements, wherein each of the plurality of elements comprises a plurality of cells, and wherein, for each of the plurality of elements, each of the plurality of cells comprises:
- a substrate;
- a support provided on the substrate and comprising a cavity;
- a membrane configured to cover the cavity;
- and
- an electrode provided on an upper surface of the membrane, and
- wherein, for each of the plurality of elements, at least one of the plurality of cells comprises a trench that is formed in the membrane,
- wherein a height of the trench is less than a height of the membrane.
Dependencies are inferred from the claim text.