Method and apparatus for high speed acquisition of moving images using pulsed illumination
AssigneeKLA-Tencor Corporation
InventorsDavid L. Brown, Yung-Ho Chuang, Yury Yuditsky
Life of this patent
Estimating the term…
Loading patent…
AssigneeKLA-Tencor Corporation
InventorsDavid L. Brown, Yung-Ho Chuang, Yury Yuditsky
Estimating the term…
A method of operating an image sensor with a continuously moving object is described. In this method, a timed delay integration mode (TDI-mode) operation can be performed during an extended-time illumination pulse. During this TDI-mode operation, charges stored by pixels of the image sensor are shifted only in a first direction, and track the image motion. Notably, a split-readout operation is performed only during non-illumination. During this split-readout operation, first charges stored by first pixels of the image sensor are shifted in the first direction and second charges stored by second pixels of the image sensor are concurrently shifted in a second direction, the second direction being opposite to the first direction.
A method of operating an image sensor to generate an image of a continuously moving object, the image sensor including a plurality of pixels aligned along a read-out axis, wherein the continuously moving object moves along an axis of movement that is parallel to the read-out axis, the method comprising:
A system comprising:
Dependencies are inferred from the claim text.