Resonator element, resonator device, electronic apparatus, moving object, and method of manufacturing resonator element
AssigneeSeiko Epson Corporation
InventorsAkinori Yamada, Shuhei Yoshida
Life of this patent
Estimating the term…
Abstract
A resonator element has a base part, vibrating arms having first principal surfaces and second principal surfaces in front-rear relationships with each other and extending from the base part, and side surfaces connected to the first principal surfaces and the second principal surfaces on ends of the vibrating arms, and the side surfaces are slopes having tilts with respect to perpendicular lines of the first principal surfaces or the second principal surfaces and provided from the first principal surfaces to the second principal surfaces, and crystal faces.
Claims15
A resonator element comprising:
- a base part;
- a vibrating arm having a first principal surface and a second principal surface in a front-rear relationship with each other and extending from the base part, the vibrating arm including:
- a weight part;
- and
- an arm part provided between the weight part and the base part in a plan view, and
- a side surface connected between the first principal surface and the second principal surface on an end of the weight part,
- the side surface being sloped with a tilt with respect to a line perpendicular to the first principal surface or to the second principal surface and provided from the first principal surface to the second principal surface, and the side surface being a crystal face, the tilt of the side surface extending in a direction from the first principal surface to the second principal surface, and an angle θ at which an extension of the slope and the first principal surface or the second principal surface intersect falls within a range of 84 degrees ≦θ≦88 degrees.
A resonator element comprising:
- a base part;
- a vibrating arm having a first principal surface and a second principal surface in a front-rear relationship with each other and extending from the base part;
- and
- a side surface connected between the first principal surface and the second principal surface on an end of the vibrating arm,
- the side surface forming an obtuse angle with one of the first principal surface or the second principal surface, and the side surface being a crystal face.
Dependencies are inferred from the claim text.