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US 9,425,711 B2Granted
Integral preload mechanism for piezoelectric actuator
AssigneeNewport Corporation
InventorHongqi Li
Life of this patent
Estimating the term…
Abstract
A piezoelectric actuator that may include a monolithic frame having an integral bias band that provides a resilient restoring force between a first contact surface and a second contact surface of the actuator that may be used to rotate an adjustment shaft. In some cases, a preload mechanism may also be included with the frame. Such piezoelectric actuators may be used for adjustable optical mounting devices such as optical mounting devices.
Claims33
A piezoelectric actuator, comprising:
- A. an actuator frame, comprising:
- (i) a monolithic configuration with all elements of the actuator frame being formed from a single piece of continuous uninterrupted material,
- (ii) a first support element including a first contact surface,
- (iii) a second support element including a second contact surface, the second contact surface being disposed in a spaced and substantially opposed relation relative to the first contact surface,
- (iv) a bias band which is disposed between the first support element and the second support element and which is configured to provide a resilient restoring force that resists perpendicular displacement of the first contact surface away from the second contact surface, and
- (v) a piezoelectric element cavity disposed between a first mount surface of the actuator frame and a second mount surface of the actuator frame;
- and
- B. a piezoelectric element which is disposed within the piezoelectric element cavity, which has a first end secured to the first mount surface, which has a second end secured to the second mount surface, which is configured to expand and contract in response to an electrical driver signal transmitted to the piezoelectric element and which is configured such that an expansion or contraction of the piezoelectric element results in respective substantially parallel reciprocating displacement between the first contact surface and the second contact surface.
5 more elements
A piezoelectric actuator, comprising:
- A. an actuator frame, comprising:
- (i) a monolithic configuration with all elements of the actuator frame being formed from a single piece of continuous uninterrupted material,
- (ii) a first support element including a first contact surface,
- (iii) a second support element including a second contact surface, the second contact surface being disposed in a spaced and substantially opposed relation relative to the first contact surface,
- (iv) a bias band which is configured to provide a resilient restoring force that resists perpendicular displacement of the first contact surface away from the second contact surface, the bias band extending distally from a distal portion of the first support element, extending around a space disposed between the first contact surface and the second contact surface, extending around a distal portion of the second support element along an outer surface of the second support element which is disposed substantially opposite the second contact surface, and terminating at the second support element at a band hinge section on a back side of the second support element, and
- (v) a piezoelectric element cavity disposed between a first mount surface of the actuator frame and a second mount surface of the actuator frame;
- and
- B. a piezoelectric element which is disposed within the piezoelectric element cavity, which has a first end secured to the first mount surface, which has a second end secured to the second mount surface, which is configured to expand and contract in response to an electrical driver signal transmitted to the piezoelectric element and which is configured such that an expansion or contraction of the piezoelectric element results in respective substantially parallel reciprocating displacement between the first contact surface and the second contact surface.
5 more elements
A piezoelectric actuator, comprising:
- A. an actuator frame, comprising:
- (i) a monolithic configuration with all elements of the actuator frame being formed from a single piece of continuous uninterrupted material,
- (ii) a first support element including a first contact surface,
- (iii) a second support element including a second contact surface, the second contact surface being disposed in a spaced and substantially opposed relation relative to the first contact surface,
- (iv) a bias band which is configured to provide a resilient restoring force that resists perpendicular displacement of the first contact surface away from the second contact surface, the bias band extending distally from the first support element around a distal portion of the first support element along an outer surface of the first support element which is disposed substantially opposite the first contact surface, extending around a space disposed between the first contact surface and the second contact surface, extending around a distal portion of the second support element along an outer surface of the second support element which is disposed substantially opposite the second contact surface, and terminating at a band hinge section which is located on a back side of the second support element, and
- (v) a piezoelectric element cavity disposed between a first mount surface of the actuator frame and a second mount surface of the actuator frame;
- and
- B. a piezoelectric element which is disposed within the piezoelectric element cavity, which has a first end secured to the first mount surface, which has a second end secured to the second mount surface, which is configured to expand and contract in response to an electrical driver signal transmitted to the piezoelectric element and which is configured such that an expansion or contraction of the piezoelectric element results in respective substantially parallel reciprocating displacement between the first contact surface and the second contact surface.
5 more elements
An adjustable optical mount, comprising:
- I. an optical mount device which is configured to receive an optical element and secure the optical element thereto;
- II. a base which is configured to be securely mounted to a stable surface and which is coupled to the optical mount device by an adjustable optical mount mechanism, the adjustable optical mount mechanism being configured to allow relative and adjustable displacement between the optical mount device and the base along at least one degree of freedom;
- and
- III. a piezoelectric actuator assembly which is operatively coupled to the adjustable optical mount mechanism, the piezoelectric actuator comprising:
- A. an actuator frame, comprising:
- (i) a monolithic configuration with all elements of the actuator frame being cut from a single piece of continuous material,
- (ii) a first support element including a first contact surface,
- (iii) a second support element including a second contact surface, the second contact surface being disposed in a spaced and substantially opposed relation relative to the first contact surface,
- (iv) a bias band which is coupled between the first support element and the second support element and which is configured to provide a restoring force for relative displacement between the first contact surface and second contact surface, and
- (v) a piezoelectric element cavity disposed between a first mount surface of the actuator frame and a second mount surface of the actuator frame;
- and
- B. a piezoelectric element which is disposed within the piezoelectric element cavity, which has a first end secured to the first mount surface, which has a second end secured to the second mount surface, which is configured to expand and contract in response to an electrical driver signal transmitted to the piezoelectric element and which is configured such that an expansion or contraction of the piezoelectric element results in respective substantially parallel displacement between the first contact surface and the second contact surface.
9 more elements
Dependencies are inferred from the claim text.