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US 9,425,382 B2Granted
Sensor protective coating
AssigneeFreescale Semiconductor, Inc.
InventorsDubravka Bilic, Stephen R. Hooper
Life of this patent
Estimating the term…
Abstract
A microelectromechanical system (MEMS) sensor device includes a substrate, a support structure supported by the substrate, a membrane supported by the support structure and spaced from the substrate, and a polymer layer covering the membrane.
Claims19
A microelectromechanical system (MEMS) sensor device comprising:
- a substrate;
- a support structure supported by the substrate;
- a membrane supported by the support structure and spaced from the substrate;
- a polymer layer covering the membrane;
- and
- a dielectric layer that laterally surrounds the membrane and the support structure, wherein the dielectric layer establishes a hermetically sealed cavity between the membrane and the substrate.
3 more elements
A microelectromechanical system (MEMS) sensor device comprising:
- a substrate;
- a support structure supported by the substrate;
- a membrane supported by the support structure and spaced from the substrate, the membrane having a periphery;
- a dielectric layer disposed along the periphery of the membrane to define an opening in the dielectric layer over the membrane;
- and
- a polymer layer disposed in the opening and covering the membrane;
- wherein the dielectric layer establishes a hermetically sealed cavity between the membrane and the substrate.
4 more elements
A microelectromechanical system (MEMS) sensor device comprising:
- a substrate;
- a support structure supported by the substrate;
- a membrane supported by the support structure and spaced from the substrate by a gap, the membrane having a periphery;
- a dielectric layer disposed along the periphery of the membrane to seal the gap, the dielectric layer having an opening over the membrane;
- and
- a polymer layer disposed in the opening;
- wherein the polymer layer is in contact with the membrane and the dielectric layer to cover the membrane and the dielectric layer, and
- wherein the dielectric layer establishes a hermetically sealed cavity between the membrane and the substrate.
5 more elements
Dependencies are inferred from the claim text.